Optical interference display cell and method of making the same
First Claim
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1. A microelectromechanical systems (MEMS) device, comprising:
- a first electrode formed over a substrate;
a second electrode formed over the first electrode and spaced apart from the first electrode by a cavity; and
at least two heat-resistant supporters formed over the substrate, wherein the second electrode is formed over and is supported by said supporters.
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Abstract
An optical interference display cell is described. A first electrode and a sacrificial layer are sequentially formed on a transparent substrate and at least two openings are formed in the first electrode and the sacrificial layer to define a position of the optical interference display cell. An insulated heat-resistant inorganic supporter is formed in each of the openings. A second electrode is formed on the sacrificial layer and the supporters. Finally, a remote plasma etching process is used for removing the sacrificial layer.
93 Citations
11 Claims
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1. A microelectromechanical systems (MEMS) device, comprising:
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a first electrode formed over a substrate;
a second electrode formed over the first electrode and spaced apart from the first electrode by a cavity; and
at least two heat-resistant supporters formed over the substrate, wherein the second electrode is formed over and is supported by said supporters. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A microelectromechanical systems (MEMS) device, comprising:
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a first electrode formed over a substrate;
a second electrode formed over the first electrode and spaced apart from the first electrode by a cavity; and
at least two inorganic supporters formed over the substrate, wherein the second electrode is formed over and is supported by said supporters.
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Specification