Self-sensing array of microcantilevers for chemical detection
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Abstract
The invention provides a chemical detection system for detecting at least one target chemical species, including a self-sensed cantilevered probe array having a plurality of self-sensed cantilevered probes, at least one chemical-sensitive coating material applied to at least one cantilevered probe in the cantilevered probe array, and an interface circuit that is coupled to the cantilevered probe array. At least one cantilevered probe in the cantilevered probe array exhibits a shifted cantilevered probe response when the cantilevered probe array is exposed to the target chemical species and the interface circuit actuates the cantilevered probe. A handheld chemical detection system and a method of operation are also disclosed.
210 Citations
158 Claims
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1-32. -32. (canceled)
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60-68. -68. (canceled)
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69. A method of chemical detection, comprising:
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exposing a self-sensed cantilevered probe array to a target chemical species, thereby providing an exposed cantilevered probe array;
heating a resistive heater coupled to at least one cantilevered probe to analyze the target chemical species;
actuating the exposed cantilevered probe array;
detecting a cantilevered probe response from the at least one self-sensed cantilevered probe in the cantilevered probe array; and
determining the target chemical species based on the cantilevered probe response. - View Dependent Claims (33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 70, 81, 82, 85, 86, 87, 157, 158)
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71-80. -80. (canceled)
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83-84. -84. (canceled)
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88-96. -96. (canceled)
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97. A cantilevered probe array system for detecting at least one target chemical species, comprising:
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a cantilevered probe array comprising a plurality of cantilevered probes, each of the plurality of cantilevered probes comprising;
a piezoelectric layer;
a first electrode in electrical communication with the piezoelectric layer;
a second electrode in electrical communication with the piezoelectric layer;
a resistive heater;
a first electrical lead; and
a second electrical lead;
wherein the first and second leads are in electrical communication with the piezoelectric layer of each of the plurality of cantilevered probes. - View Dependent Claims (98, 99, 100, 101, 102, 103, 104, 105, 106, 107, 108, 109, 110, 111, 112, 113, 114, 115, 116, 117, 118, 119, 120, 121, 122, 123, 124, 125, 126, 127, 128, 129, 130, 131, 132, 133, 134, 135, 136, 137, 138, 139, 140, 141, 142, 143, 144)
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145. A system for sensing a chemical species, comprising:
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an enclosure, the enclosure having an inlet port to allow ingression of a chemical species into the enclosure and an outlet port to allow egression of the chemical species out from the enclosure;
a cantilevered probe array coupled to the enclosure, the cantilevered probe array comprising a plurality of cantilevered probes, each of the plurality of cantilevered probes comprising;
a piezoelectric layer;
a first electrode in electrical communication with the piezoelectric layer;
a second electrode in electrical communication with the piezoelectric layer;
a resistive heater;
a first electrical lead;
a second electrical lead, wherein the first and second leads are in electrical communication with the piezoelectric layer of each of the plurality of cantilevered probes; and
a circuit coupled to the cantilevered probe array. - View Dependent Claims (146, 147, 148, 149, 150, 151, 152, 153, 154, 155, 156)
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Specification