Precursors for CVD silicon carbo-nitride films
First Claim
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1. A process for forming silicon carbo-nitride films on a substrate through chemical vapor deposition of a silicon carbo-nitride film forming precursor which comprises:
- using a precursor selected from the group consisting of an aminosilane represented by the formulas;
and mixtures thereof, wherein R is selected from C1-C10 alkyl groups, linear, branched, or cyclic, saturated or unsaturated;
aromatic, heterocyclic, amine groups, or silyl in formula C, R1 is selected from C2-C10 alkyl groups, linear, branched, or cyclic, saturated or unsaturated;
aromatic, heterocyclic, hydrogen, silyl groups with or without substituents with R and R1 in formula A also being combinable into a cyclic group (CH2)n, wherein n is from 1-6, R and R in formula C also being combinable into a cyclic group and R2 representing a single bond, (CH2)n chain, a ring, SiR2, or SiH2.
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Abstract
Classes of liquid aminosilanes have been found which allow for the production of silicon carbo-nitride films of the general formula SixCyNz. These aminosilanes, in contrast, to some of the precursors employed heretofore, are liquid at room temperature and pressure allowing for convenient handling. In addition, the invention relates to a process for producing such films.
The classes of compounds are generally represented by the formulas:
- and mixtures thereof, wherein R and R1 in the formulas represent aliphatic groups typically having from 2 to about 10 carbon atoms, e.g., alkyl, cycloalkyl with R and R1 in formula A also being combinable into a cyclic group, and R2 representing a single bond, (CH2)n, a ring, or SiH2.
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18 Claims
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1. A process for forming silicon carbo-nitride films on a substrate through chemical vapor deposition of a silicon carbo-nitride film forming precursor which comprises:
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using a precursor selected from the group consisting of an aminosilane represented by the formulas;
and mixtures thereof, wherein R is selected from C1-C10 alkyl groups, linear, branched, or cyclic, saturated or unsaturated;
aromatic, heterocyclic, amine groups, or silyl in formula C, R1 is selected from C2-C10 alkyl groups, linear, branched, or cyclic, saturated or unsaturated;
aromatic, heterocyclic, hydrogen, silyl groups with or without substituents with R and R1 in formula A also being combinable into a cyclic group (CH2)n, wherein n is from 1-6, R and R in formula C also being combinable into a cyclic group and R2 representing a single bond, (CH2)n chain, a ring, SiR2, or SiH2. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. In a process for forming a silicon carbo-nitride film wherein such film is formed by the chemical vapor deposition of a silane precursor, the improvement for forming films having the general compositional structure SixCyNz which comprises:
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employing an aminosilane as the silane precursor which is represented by the formula;
wherein R is selected from C1-C10 alkyl groups, linear, branched, or cyclic, saturated or unsaturated;
aromatic, heterocyclic and R1 is selected from C2-C10 alkyl groups, linear, branched, or cyclic, heterocyclic, hydrogen, silyl groups with R and R1 also being combinable into a cyclic group (CH2)n, wherein n is from 1-6. - View Dependent Claims (16, 17, 18)
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Specification