Integrated monolithic tri-axial micromachined accelerometer
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Abstract
A monolithic integrated 3-axis accelerometer chip includes a single crystal substrate, the substrate including at least one single crystal membrane layer portion. A single sensor microstructure made from the single crystal membrane senses acceleration in each of the three orthogonal directions. At least one electronic circuit can also be disposed on the chip, such as a circuit for driving, detecting, controlling and signal processing.
41 Citations
34 Claims
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1-20. -20. (canceled)
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21. A monolithic integrated 3-axis accelerometer chip, comprising:
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a single crystal substrate, said single crystal substrate including at least one single crystal membrane layer portion;
a single microstructure formed using said membrane layer, said sensor microstructure capacitively sensing and providing acceleration data for all three orthogonal axes, wherein said sensor microstructure comprises a plurality of comb finger sets including at least one comb finger set for motion sensing in each of said three orthogonal axes, said comb finger sets comprising a plurality of comb fingers, said comb finger sets for each of said three orthogonal axes include said membrane layer, and at least one electronic circuit formed on said single crystal substrate for processing data said acceleration data. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34)
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Specification