Module for Coating System and Associated Technology

• US 20060260938A1
• Filed: 05/08/2006
• Published: 11/23/2006
• Est. Priority Date: 05/20/2005
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Petrach, Philip M.
• Application Number:
  US11/382,240
• Publication Number:
  US 20060260938A1
• Time in Patent Office: Days
• US Class Current: 204/298.160
• CPC Class Codes: C23C 14/568 Transferring the substrates through a series of coating stations C23C14/562 takes precedence
• CPC Class Codes: H01J 37/3405 Magnetron sputtering
• CPC Class Codes: H01J 37/3411 Constructional aspects of the reactor
• CPC Class Codes: H01J 37/3444 Associated circuits
• CPC Class Codes: H01J 37/3497 Temperature of target

Abstract

A module, such as a pump module or a sputtering module, comprises a lid assembly sufficient to fit or to cover a compartment, such as a pump compartment or a sputtering compartment, of a coating system, such as a modular coating system. A sputtering module comprises a power supply unit and is sufficient for receiving an electrical input and for delivering an electric output sufficient for sputtering in a sputtering compartment. A pump module, it comprises at least one pump and is sufficient for receiving an electrical input sufficient for operating the pump or pumps. Various connections between the module, external supplies, components or devices, and the compartment may be made automatically and/or manually. A control connection may be such that an external controller or a central controller is able to recognize a particular module that is associated with a particular compartment of the coating system.

Claims

1. A module for use in association with a coater that comprises at least one compartment, the module comprising:

a lid sufficient to fit an opening of the compartment; and

a power supply physically associated with the lid, another lid associated with a nearby compartment, or the coater, the power supply sufficient to receive an electrical input and to provide an electrical output sufficient for sputtering within the compartment.

2. The module of claim 1, wherein the power supply is sufficient to maintain or to modify the electrical output based on a predetermined point or a predetermined range.

3. The module of claim 1, wherein the electrical input is a three-phase alternating current input from about 380 volts to about 600 volts a 380-volts and about 50 Hertz to about 60 Hertz.

4. The module of claim 1, further comprising a magnetron physically associated with the lid.

5. The module of claim 4, wherein the magnetron is selected from a planar magnetron and a cylindrical magnetron.

6. The module of claim 4, wherein the magnetron is a cylindrical magnetron and the module further comprises a first endblock and a second endblock physically associated with the lid, the first endblock and the second endblock together sufficient for supporting the cylindrical magnetron.

7. The module of claim 1, further comprising a cover that at least partially encloses the power supply.

8. The module of claim 1, further comprising a cover, wherein the power supply is physically associated with the lid via the cover.

9. A module for use in association with a coater that comprises at least one compartment and at least one compartment connector associated with the compartment, the module comprising:

a module comprising a lid sufficient to fit an opening of the compartment;

a power supply physically associated with the lid, or another lid associated with a nearby compartment, or the coater, the power supply sufficient to receive an electrical input and to provide an electrical output sufficient for sputtering within the compartment; and

a connector physically associated with the module sufficient for connecting with the compartment connector when the lid and the compartment are sufficiently positioned relative to one another, such that electrical communication is provided between the power supply and the compartment.

10. A module for use in association with a coater that comprises at least one compartment and at least one compartment connector associated with the compartment, the module comprising:

a module comprising a lid sufficient to fit an opening of the compartment;

a power supply physically associated with the lid, another lid associated with a nearby compartment, or the coater, the power supply sufficient to receive an electrical input and to provide an electrical output sufficient for sputtering within the compartment; and

a connector physically associated with the module sufficient for connecting with the compartment connector when the lid and the compartment are sufficiently positioned relative to one another, such that fluid communication is provided between a fluid supply and the compartment.

11. A module for use in association with a coater that comprises at least one compartment and at least one control connector associated with the compartment, the module comprising:

a module comprising a lid sufficient to fit an opening of the compartment; and

a power supply physically associated with the lid, another lid associated with a nearby compartment, or the coater, the power supply sufficient to receive an electrical input and to provide an electrical output sufficient for sputtering within the compartment;

wherein the module is sufficient for connection with the control connector, such that controlled electrical communication is provided between the power supply and the compartment.

12. A module for use in association with a coater that comprises at least one compartment and at least one control connector associated with the compartment and sufficient for communication with a controller, the module comprising:

a module comprising a lid sufficient to fit an opening of the compartment; and

a power supply physically associated with the lid, another lid associated with a nearby compartment, or the coater, the power supply sufficient to receive an electrical input and to provide an electrical output sufficient for sputtering within the compartment;

wherein the module is sufficient for connection with the control connector and is associated with an identifier sufficient for recognition by the controller.

13. A module for use in association with a coater that comprises at least one compartment, at least one foreline, and at least one foreline connector physically associated with the foreline, the module comprising:

a lid sufficient to fit an opening of the compartment;

at least one pump physically associated with the lid and sufficient to provide vacuum to the compartment; and

a module connector physically associated with the module and sufficient for automatically connecting with the foreline connector when the lid and the compartment are sufficiently positioned relative to one another.

14. The module of claim 13, wherein at least one connector of the foreline connector and the module connector comprises a bellows.