High voltage silicon carbide devices having bi-directional blocking capabilities and methods of fabricating the same

• US 20060261345A1
• Filed: 05/18/2005
• Published: 11/23/2006
• Est. Priority Date: 05/18/2005
• Status: Active Grant

• Current Assignee: CREE Incorporated (Wolfspeed, Inc.)
• Original Assignee: CREE Incorporated (Wolfspeed, Inc.)
• Inventors: Agarwal, Anant K., Hobgood, Hudson McDonald, Ryu, Sei-Hyung, Das, Mrinal K., Palmour, John W., Jenny, Jason R.
• Granted Patent: US 7,391,057 B2
• Time in Patent Office: Days
• US Class Current: 257/77
• CPC Class Codes: H01L 29/0661 specially adapted for altering the breakdown voltage by removing semiconductor material at, or in the neighbourhood of, a reverse biased junction, e.g. by bevelling, moat etching, depletion etching
• CPC Class Codes: H01L 29/1608 Silicon carbide
• CPC Class Codes: H01L 29/74 Thyristor-type devices, e.g. having four-zone regenerative action two-terminal thyristors H01L29/87

Abstract

High voltage silicon carbide (SiC) devices, for example, thyristors, are provided. A first SiC layer having a first conductivity type is provided on a first surface of a voltage blocking SiC substrate having a second conductivity type. A first region of SiC is provided on the first SiC layer and has the second conductivity type. A second region of SiC is provided in the first SiC layer. The second region of SiC has the first conductivity type and is adjacent to the first region of SiC. A second SiC layer having the first conductivity type is provided on a second surface, opposite the first surface, of the voltage blocking SiC substrate. First, second and third contacts are provided on the first region of SiC, the second region of SiC and the second SiC layer, respectively. Related methods of fabricating high voltage SiC devices are also provided.

Claims

16. A silicon carbide (SiC) thyristor, comprising:

a first SiC layer having a first conductivity type on a first surface of a voltage blocking SiC substrate having a second conductivity type;

a first SiC anode region on the first SiC layer and having the second conductivity type;

a first SiC gate region in the first SiC layer, having the first conductivity type and being adjacent to the first SiC anode region;

a second SiC layer having the first conductivity type on a second surface of the voltage blocking SiC substrate;

a second SiC anode region on the second SiC layer and having the second conductivity type;

a second SiC gate region in the second SiC layer, having the first conductivity type and being adjacent to the second SiC anode region; and

first, second, third and fourth contacts on the first and second SiC anode regions and on the first and second SiC gate regions, respectively.

17. The thyristor of claim 16, further comprising:

a first metal overlayer on the first and third contacts that electrically connects the first and third contacts; and

a second metal overlayer on the second and fourth contacts that electrically connects second and fourth contacts.

18. The thyristor of claim 17, wherein the first and second overlayers are patterned so as to allow light to enter the device such that the device turns on responsive to the light.

19. The thyristor of claim 16, wherein the voltage blocking substrate is a bidirectional voltage blocking layer and has a bevel edge termination structure.

20. The thyristor of claim 19, wherein the voltage blocking substrate is a boule grown substrate.

21. The thyristor of claim 19, wherein the bevel edge termination structure provides:

a first blocking junction between the first surface of the voltage blocking substrate and the first SiC layer; and

a second blocking junction between the second surface of the voltage blocking substrate and the second SiC layer.

22. The device of claim 21, wherein the device has a voltage drop of about 2.7 V at the first blocking junction.

23. The device of claim 16, wherein a resistance of the first SiC layer beneath the first SiC anode region is large enough to provide a 2.7 V voltage drop between the first region and the second region with only a negligible lateral current 11 in the first SiC layer.

24. A method of forming a high voltage silicon carbide (SiC) device, comprising:

forming a first SiC layer having a first conductivity type on a first surface of a voltage blocking SiC substrate having a second conductivity type;

forming a first region of SiC on the first SiC layer and having the second conductivity type;

forming a second region of SiC in the first SiC layer, having the first conductivity type and being adjacent to the first region of SiC;

forming a second SiC layer having the first conductivity type on a second surface of the voltage blocking SiC substrate;

forming a third region of SiC on the second SiC layer and having the second conductivity type;

forming a fourth region of SiC in the second SiC layer, having the first conductivity type and being adjacent to the third region of SiC; and

forming first and second contacts on the first and third regions of SiC, respectively.

1. A high voltage silicon carbide (SiC) device, comprising;

a first SiC layer having a first conductivity type on a first surface of a voltage blocking SiC substrate having a second conductivity type;

a first region of SiC on the first SiC layer and having the second conductivity type;

a second region of SiC in the first SiC layer, having the first conductivity type and being adjacent to the first region of SiC;

a second SiC layer having the first conductivity type on a second surface of the voltage blocking SiC substrate;

a third region of SiC on the second SiC layer and having the second conductivity type;

a fourth region of SiC in the second SiC layer, having the first conductivity type and being adjacent to the third region of SiC; and

first and second contacts on the first and third regions of SiC, respectively.

2. The device of claim 1, further comprising:

third and fourth contacts on the second and fourth regions of SiC, respectively;

a first metal overlayer on the first and third contacts that electrically connects the first and third contacts; and

a second metal overlayer on the second and fourth contacts that electrically connects the second and fourth contacts.

3. The device of claim 2, wherein the first and second overlayers are patterned so as to allow light to enter the device such that the device turns on responsive to the light

4. The device of claim 1, wherein the voltage blocking substrate is a bidirectional voltage blocking layer and has a bevel edge termination structure.

5. The device of claim 4, wherein the voltage blocking substrate is a boule grown substrate.

6. The device of claim 4, wherein the bevel edge termination structure provides:

a first blocking junction between the first surface of the voltage blocking substrate and the first SiC layer; and

a second blocking junction between the second surface of the voltage blocking substrate and the second SiC layer.

7. The device of claim 6, wherein the device has a voltage drop of about 2.7 V at the first blocking junction.

8. The device of claim 1, wherein a resistance of the first SiC layer beneath the first region of SiC is large enough to provide a 2.7 V voltage drop between the first region and the second region with only a negligible lateral current I₁ in the first SiC layer.

9. The device of claim 1, wherein the voltage blocking substrate comprises a 4H—

SiC high purity substrate having a carrier concentration no greater than about 1.0×

10¹⁵ cm<sup>−

3</sup>.

10. The device of claim 9, wherein the voltage blocking substrate has a thickness of greater than about 100 μ

m.

11. The device of claim 1, wherein the first conductivity type comprises p-type SiC and the second conductivity type comprises n-type SiC.

12. The device of claim 1, wherein the first conductivity type comprises n-type SiC and the second conductivity type comprises p-type SiC.

13. The device of claim 1:

wherein the first and second SiC layers have carrier concentrations of from about 1.0×

10¹⁵ cm<sup>−

3</sup> to about 1.0×

10¹⁹ cm<sup>−

3</sup>;

wherein the first and third regions of SiC have carrier concentrations of from about 1.0×

10¹⁶ cm<sup>−

3</sup> to about 1.0×

10²¹ cm<sup>−

3</sup>; and

wherein the second and fourth regions of SiC have carrier concentrations of from about 1.0×

10¹⁷ cm<sup>−

3</sup> to about 1.0×

10²¹ cm<sup>−

3</sup>.

14. The device of claim 1:

wherein the first and second SiC layers have thicknesses of from about 0.1 μ

m to about 20.0 μ

m;

wherein the first and third regions of SiC have thicknesses of from about 0.1 μ

m to about 10.0 μ

m; and

wherein the second and fourth regions of SiC extend into the first SiC layer and the second SiC layer, respectively, from about 0.1 μ

m to about 2.0 μ

m.

15. The device of claim 1, wherein the SiC device comprises a thyristor, wherein the first and third regions of SiC comprise anode regions of the thyristor and wherein the second and fourth regions of SiC comprise gate regions of the thyristor.

25. The method of claim 24, further comprising:

forming third and fourth contacts on the second and fourth regions of SiC, respectively;

forming a first metal overlayer on the first and third contacts that electrically connects the first and third contacts; and

forming a second metal overlayer on the second and fourth contacts that electrically connects the second and fourth contacts.

26. The method of claim 25, further comprising patterning the first and second overlayers so as to allow light to enter the device such that the device turns on responsive to the light.

30. The method of claim 25, wherein forming the first, second, third and fourth contacts comprises:

depositing a first metal on the first and third regions of SiC;

depositing a second metal on the second and fourth regions of SiC; and

annealing the deposited first and second metals at a temperature of from about 500°

C. to about 1200°

C. in an inert ambient.

31. The method of claim 24, wherein the voltage blocking substrate comprises a 4H—

SiC high purity substrate having a carrier concentration no greater than about 1.0×

10¹⁵ cm<sup>−

3</sup>.

32. The method of claim 31, wherein the voltage blocking substrate has a thickness of greater than about 100 μ

m.

33. The method of claim 24, wherein the first conductivity type comprises p-type SiC and the second conductivity type comprises n-type SiC.

34. The method of claim 24, wherein the first conductivity type comprises n-type SiC and the second conductivity type comprises p-type SiC.

35. The method of claim 24:

wherein forming the first region of SiC comprises;

forming a third SiC layer on the first SiC layer and having the second conductivity type; and

patterning the third SiC layer to provide the first region of SiC; and

wherein forming the third region of SiC comprises;

forming a fourth SiC layer on the second SiC layer and having the second conductivity type; and

patterning the fourth SiC layer to provide the third region of SiC.

36. The method of claim 35:

wherein the first and second SiC layers have carrier concentrations of from about 1.0×

10¹⁵ cm<sup>−

3</sup> to about 1.0×

10¹⁹ cm<sup>−

3</sup>; and

wherein the third and fourth SiC layers have a carrier concentration of from about 1.0×

10¹⁶ cm<sup>−

3</sup> to about 1.0×

10²¹ cm<sup>−

3</sup>.

37. The method of claim 35:

wherein the first and second SiC layers have thicknesses of from about 0.1 μ

m to about 20.0 μ

m; and

wherein the third and fourth SiC layers have thicknesses of from about 0.1 μ

m to about 100 μ

m.

38. The method of claim 24, wherein the SiC device comprises a thyristor, wherein the first and third regions of SiC comprise anode regions of the thyristor and wherein the second and fourth regions of SiC comprise gate regions of the thyristor.

39. The method of claim 24:

wherein forming the second region of SiC comprises;

implanting ions in the first layer of SiC, the ions having carrier concentrations of from about 1.0×

10¹⁷ cm<sup>−

3</sup> to about 1.0×

10²¹ cm<sup>−

3</sup>, to provide the second SiC region extending from about 0.1 μ

m to about 2.0 μ

m into the first layer of SiC; and

wherein forming the fourth region of SiC comprises;

implanting ions in the second layer of SiC, the ions having carrier concentrations of from about 1.0×

10¹⁷ cm<sup>−

3</sup> to about 1.0×

10²¹ cm<sup>−

3</sup>, to provide the fourth SiC region extending from about 0.1 μ

m to about 2.0 μ

m into the second layer of SiC.

26-1. The method of claim 24, further comprising performing a bevel edge termination process on sidewalls of the SiC device.

28. The method of claim 27, wherein the bevel edge termination process comprises one of plasma etching and mechanical grinding.

29. The method of claim 28, wherein the bevel edge termination process is followed by:

forming a sacrificial oxide layer on a surface of the device; and

removing the sacrificial oxide layer to remove any damage caused by the bevel edge termination process.

40. A high voltage silicon carbide (SiC) device, comprising:

a first SiC layer having a first conductivity type on a first surface of a voltage blocking SiC epilayer having a second conductivity type;

a first region of SiC on the first SiC layer and having the second conductivity type;

a second region of SiC in the first SiC layer, having the first conductivity type and being adjacent to the first region of SiC;

a second SiC layer having the first conductivity type on a second surface of the voltage blocking SiC epilayer;

a third region of SiC on the second SiC layer and having the second conductivity type;

a fourth region of SiC in the second SiC layer, having the first conductivity type and being adjacent to the third region of SiC; and

first and second contacts on the first and third regions of SiC, respectively.

41. A silicon carbide (SiC) thyristor, comprising:

a first SiC layer having a first conductivity type on a first surface of a voltage blocking SiC epilayer having a second conductivity type;

a first SiC anode region on the first SiC layer and having the second conductivity type;

a first SiC gate region in the first SiC layer, having the first conductivity type and being adjacent to the first SiC anode region;

a second SiC layer having the first conductivity type on a second surface of the voltage blocking SiC epilayer;

a second SiC anode region on the second SiC layer and having the second conductivity type;

a second SiC gate region in the second SiC layer, having the first conductivity type and being adjacent to the second SiC anode region; and

first, second, third and fourth contacts on the first and second SiC anode regions and on the first and second SiC gate regions, respectively.

42. A method of forming a high voltage silicon carbide (SiC) device, comprising:

forming a first SiC layer having a first conductivity type on a first surface of a voltage blocking SiC epilayer having a second conductivity type;

forming a first region of SiC on the first SiC layer and having the second conductivity type;

forming a second region of SiC in the first SiC layer, having the first conductivity type and being adjacent to the first region of SiC;

forming a second SiC layer having the first conductivity type on a second surface of the voltage blocking SiC epilayer;

forming a third region of SiC on the second SiC layer and having the second conductivity type;

forming a fourth region of SiC in the second SiC layer, having the first conductivity type and being adjacent to the third region of SiC; and

forming first and second contacts on the first and third regions of SiC, respectively.