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A TOUCHING MICROLENS STRUCTURE FOR A PIXEL SENSOR AND METHOD OF FABRICATION

  • US 20060261426A1
  • Filed: 05/18/2005
  • Published: 11/23/2006
  • Est. Priority Date: 05/18/2005
  • Status: Active Grant
First Claim
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1. A sensor including an array of pixels, each pixel comprising:

  • a layer comprising a plurality of microlens structures for receiving light;

    a semiconductor substrate including a light sensitive element formed therein for receiving light incident to said pixel and focused by a respective microlens structure; and

    , one or more dielectric material and embedded metallization layers provided between said substrate and a top layer, wherein each microlens structure of a pixel is webbed in a direction such that said structure touches a microlens structure of an adjacent pixel in said array, and such that a curvature of said mircrolens structure is uniform in all directions to thereby maximize collection of light incident to the microlens structure from all directions.

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