Display using a movable electron field emitter and method of manufacture thereof

• US 20060261724A1
• Filed: 05/19/2005
• Published: 11/23/2006
• Est. Priority Date: 05/19/2005
• Status: Active Grant

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: DiCarlo, Anthony
• Granted Patent: US 7,786,662 B2
• Time in Patent Office: Days
• US Class Current: 313/495
• CPC Class Codes: H01J 29/00 Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
• CPC Class Codes: H01J 31/123 Flat display tubes

Abstract

A field emission device 100 comprises an anode 105 and a cathode 110 separated by a distance 115 from the anode. At least one of the anode or cathode is configured to move with respect to the other in response to an applied voltage 120 to at least one of the anode and cathode, the distance being adjustable by the movement.

Claims

1. A field emission device, comprising:

an anode; and

a cathode separated by a distance from said anode and wherein at least one of said anode or said cathode is configured to move with respect to the other in response to an applied voltage to at least one of said anode and said cathode, said distance being adjustable by said movement.

2. The field emission device as recited in claim 1, wherein said anode is coupled to a first substrate and said cathode is coupled to a second substrate, and said distance is adjusted by at least one of said first and second substrates being movable with respect to the other by application of said applied voltage.

3. The field emission device as recited in claim 2, wherein at least one of said first or second substrates is a micro-electro-mechanical system.

4. The field emission device as recited in claim 3, wherein said second substrate comprises a hinged element and a spring element, wherein said spring element is rotated about hinged element to change said distance.

5. The field emission device as recited in claim 4, wherein rotation of said spring element is achieved by applying said voltage to an electrode pad electrostatically coupled to said spring element.

6. The field emission device as recited in claim 5, wherein said voltage is applied through a CMOS device electrically coupled to said electrode pad.

7. The field emission device as recited in claim 1, wherein said cathode is movable and said anode is fixed.

8. The field emission device as recited in claim 1, wherein said anode is movable and said cathode is fixed.

9. The field emission device as recited in claim 1, wherein both said anode and said cathode are movable.

10. The field emission device as recited in claim 1, wherein said cathode comprises a knife-edged tip.

11. The field emission device as recited in claim 1, wherein a maximum span of said distance ranges from 2 to 10 times longer than a minimum span of said distance.

12. The field emission device as recited in claim 1, wherein a reduction in said distance to said minimum span causes an electron emission from a tip of said cathode to said anode.

13. A method of manufacturing a field emission device, comprising:

forming a control circuit in a semiconductor substrate;

forming an anode over said semiconductor substrate;

forming a cathode over said semiconductor substrate, wherein said cathode is separated by a distance from said anode, said distance being adjustable by moving at least one of said cathode and anode with respect to the other by applying a voltage to at least one of said anode and said cathode.

14. The method recited in claim 13, wherein forming said control circuit comprises forming a plurality of CMOS devices in said semiconductor substrate.

15. The method as recited in claim 13, wherein forming said anode comprises coupling said anode to a first substrate, wherein said first substrate is electrically coupled to said cathode.

16. The method as recited in claim 13, wherein forming said cathode comprises coupling said cathode to a second substrate, said second substrate comprising a spring element that is electrostatically coupled to an electrode pad and wherein said second substrate moves said cathode when said voltage is applied to said cathode.

17. The method as recited in claim 13, wherein forming said cathode further comprises forming a knife-edged tip.

18. A display system, comprising:

a field emission device comprising;

an anode; and

a cathode separated by a distance from said anode and wherein at least one of said anode or said cathode is configured to be movable with respect to the other in response to an applied voltage to at least one of said anode and said cathode, said distance being adjustable by moving at least one of said anode or said cathode to alter said distance; and

a phosphor surface, wherein a current of electrons passing from said cathode to said anode is configured to pass through said anode thereby causing said phosphor surface to emit light.

19. The system as recited in claim 18, wherein said cathode is configured to move to a minimum span of said distance when a first voltage is applied to said cathode and a maximal span of said distance when a second voltage is applied to said cathode.

20. The system as recited in claim 18, wherein said field emission device is configured to operate at a pressure of about 1 atmosphere.