Microelectromechanical resonator structure, and method of designing, operating and using same
First Claim
1. A microelectromechanical resonator structure comprising:
- a plurality of elongated straight beam sections wherein each beam section includes a first end and a second end;
a plurality of curved sections, wherein each curved section includes a first end and a second end, and wherein at least one curved section includes a nodal point;
wherein each end of a beam section is connected to an associated end of one of the curved section to thereby form a geometric shape;
at least one anchor coupling section; and
a substrate anchor, coupled to the nodal point via the anchor coupling section, to secure the resonator structure to a substrate.
2 Assignments
0 Petitions
Accused Products
Abstract
A micromechanical resonator structure including a plurality of straight or substantially straight beam sections that are connected by curved or rounded sections. Each elongated beam section is connected to another elongated beam section at a distal end via the curved or rounded sections thereby forming a geometric shape having at least two elongated beam sections that are interconnected via curved or rounded sections (for example, a rounded triangle shape, rounded square or rectangle shape). The structure includes one or more nodal points or areas (i.e., portions of the resonator structure that are stationary, experience little movement, and/or are substantially stationary during oscillation of the resonator structure) in one or more portions or areas of the curved sections of the structure. The nodal points are suitable and/or preferable locations to anchor the resonator structure to the substrate. In operation, the resonator structure oscillates in a combined elongating (or breathing) mode and bending mode; that is, the beam sections (which oscillate or vibrate at the same frequency) exhibit an elongating-like (or breathing-like) motion and a bending-like motion.
-
Citations
35 Claims
-
1. A microelectromechanical resonator structure comprising:
-
a plurality of elongated straight beam sections wherein each beam section includes a first end and a second end;
a plurality of curved sections, wherein each curved section includes a first end and a second end, and wherein at least one curved section includes a nodal point;
wherein each end of a beam section is connected to an associated end of one of the curved section to thereby form a geometric shape;
at least one anchor coupling section; and
a substrate anchor, coupled to the nodal point via the anchor coupling section, to secure the resonator structure to a substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
-
-
15. A microelectromechanical resonator structure comprising:
-
a plurality of elongated straight beam sections wherein each beam section includes a first end and a second end;
a plurality of curved sections, wherein each curved section includes a first end and a second end, and wherein each curved section includes a nodal point;
wherein each end of a beam section is connected to an associated end of one of the curved sections to thereby form a geometric shape;
a plurality of anchor coupling sections; and
a substrate anchor, coupled to the nodal points of each curved section via the plurality of anchor coupling sections, to secure the resonator structure to a substrate. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23)
-
-
24. A microelectromechanical resonator structure comprising:
-
a plurality of elongated straight beam sections wherein each beam section includes a first end and a second end;
a plurality of curved sections, wherein each curved section includes a first end and a second end, and wherein each curved section includes at least one nodal point;
wherein each end of a beam section is connected to an associated end of one of the curved sections to thereby form a geometric shape;
a substrate anchor, coupled to at least one nodal point of each curved section, to secure the resonator structure to a substrate;
a plurality of sense electrodes;
a plurality of drive electrodes, wherein the sense and drive electrodes are juxtaposed the plurality of elongated straight beam sections; and
sense circuitry, coupled to the sense electrodes, to provide an output signal. - View Dependent Claims (25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35)
-
Specification