Transparent thin films
First Claim
1. A microelectromechanical structure (“
- MEMS”
) device comprising;
a superstructure;
a stationary layer; and
a movable layer disposed between said superstructure and said stationary layer.
3 Assignments
0 Petitions
Accused Products
Abstract
An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic hardware can be field reconfigured to accommodate different display formats and/or application functions. An IMod'"'"'s electromechanical behavior can be decoupled from its optical behavior. An improved actuation means is provided, some one of which may be hidden from view. An IMod or IMod array is fabricated and used in conjunction with a MEMS switch or switch array. An IMod can be used for optical switching and modulation. Some IMods incorporate 2-D and 3-D photonic structures. A variety of applications for the modulation of light are discussed. A MEMS manufacturing and packaging approach is provided based on a continuous web fed process. IMods can be used as test structures for the evaluation of residual stress in deposited materials.
103 Citations
22 Claims
-
1. A microelectromechanical structure (“
- MEMS”
) device comprising;
a superstructure;
a stationary layer; and
a movable layer disposed between said superstructure and said stationary layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
- MEMS”
-
16. A microelectromechanical structure (“
- MEMS”
) device comprising;
a transparent layer;
a stationary layer; and
a movable layer disposed between said transparent layer and said stationary layer. - View Dependent Claims (17, 18)
- MEMS”
-
19. An interferometric modulator (“
- iMOD”
) device comprising;
a transparent layer;
a stationary layer; and
a movable mirror disposed between said transparent layer and said stationary layer, wherein an interferometric cavity is formed between said transparent layer and said movable mirror. - View Dependent Claims (20, 21, 22)
- iMOD”
Specification