AN OPTICAL MICRO-SPECTROMETER
First Claim
1. An optical spectrometer comprising:
- a first wafer;
a second wafer having a first channel and second channel situated on the first wafer;
a light source situated at a first end of the first channel;
a reflector situated at a second end of the first channel and a first end of the second channel; and
a detector array situated at a second end of the second channel; and
wherein the light source, reflector and detector array are situated about a circumference of a circle in a plane.
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Accused Products
Abstract
An optical spectrometer having a multi-wafer structure. The structure may be fabricated with MEMS technology. The spectrometer may be integrated with a fluid analyzer. A reflective grating such as a diffraction or holographic grating situated on the circumference of a Rowland circle along with a point of light emission and a detector may be a configuration of the spectrometer. Some configurations may use an external light source where the light may be optically conveyed to the point of emission on the circle. There may be a Raman configuration where an interaction of light with a sample or an interactive film of a channel in a fluid analyzer is the point of light emission for the spectrometer. In some configurations of the spectrometer, the grating and/or the film may be reflective or transmissive.
104 Citations
21 Claims
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1. An optical spectrometer comprising:
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a first wafer;
a second wafer having a first channel and second channel situated on the first wafer;
a light source situated at a first end of the first channel;
a reflector situated at a second end of the first channel and a first end of the second channel; and
a detector array situated at a second end of the second channel; and
wherein the light source, reflector and detector array are situated about a circumference of a circle in a plane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A spectrometer comprising:
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a first wafer;
a detector situated on the first wafer;
a second wafer situated on the first wafer, having a first opening about the detector, and having a light source;
a third wafer, situated on the second wafer, having a second opening approximately aligned with the first opening, and having a channel intersecting the first and second openings; and
a fourth wafer situated on the third wafer, and having a reflector-grating situated proximate to the second opening. - View Dependent Claims (10, 11, 12, 13)
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14. A spectrometer comprising:
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an enclosure;
a window at a first position of the enclosure;
a reflector-grating at a second position of the enclosure;
a detector at a third position of the enclosure; and
a source of light situated outside of the enclosure proximate to the window; and
wherein;
a light path may go from the source of light to the reflector-grating, and from the reflector-grating to the detector;
the source of light, the reflector-grating and the detector are situated proximate to a circumference of a circle. - View Dependent Claims (15, 16, 17)
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18. A spectrometer comprising:
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a light source;
a film situated on a support;
a grating situated proximate to the film;
a detector; and
a filter situated between the grating and the detector; and
wherein;
a light path goes from the light source to the film, from the film to the grating, from the grating through the filter to the detector; and
the film emits Raman light upon impingement of light from the light source. - View Dependent Claims (19)
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20. A spectrometer comprising:
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a light source;
a film situated on a support;
a filter situated between the light source and the film;
a grating situated proximate to the filter; and
a detector proximate to the grating; and
wherein;
a light path is from the light source to the film, from the film to the filter, from the filter to the grating, and from the grating to the detector; and
Raman light may be emitted from the film upon receipt of light from the light source. - View Dependent Claims (21)
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Specification