MEMS devices with stiction bumps
First Claim
Patent Images
1. A microelectromechanical structure (“
- MEMS”
) device comprising;
a substrate;
a movable membrane; and
one or more stiction bumps disposed between said substrate and said movable membrane, wherein said one or more stiction bumps are configured to mitigate stiction between said substrate and said movable membrane.
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Abstract
An interferometric modulator comprising a substrate, a movable membrane and one or more stiction bumps disposed between the substrate and the movable membrane. The stiction bumps are configured to mitigate stiction between the substrate and the movable membrane.
197 Citations
34 Claims
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1. A microelectromechanical structure (“
- MEMS”
) device comprising;
a substrate;
a movable membrane; and
one or more stiction bumps disposed between said substrate and said movable membrane, wherein said one or more stiction bumps are configured to mitigate stiction between said substrate and said movable membrane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
- MEMS”
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14. A method of making a microelectromechanical structure (“
- MEMS”
) device, comprising;
providing a substrate;
forming a movable membrane on said substrate; and
providing at least one stiction bump configured to mitigate stiction between said substrate and said movable membrane. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
- MEMS”
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27. A microelectromechanical structure (“
- MEMS”
) device comprising;
a substrate;
a movable membrane; and
means for reducing stiction between said substrate and said movable membrane. - View Dependent Claims (28, 29, 30, 31, 32, 33, 34)
- MEMS”
Specification