Process for low temperature plasma deposition of an optical absorption layer and high speed optical annealing
First Claim
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1. A method of processing a workpiece, comprising:
- introducing an optical absorber material precursor gas into a chamber containing the workpiece;
generating an RF oscillating toroidal plasma current in a reentrant path that includes a process zone overlying said workpiece by applying RF source power, so as to deposit a layer of an optical absorber material on said workpiece;
exposing said workpiece to optical radiation that is at least partially absorbed in said optical absorber layer.
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Abstract
A method of processing a workpiece includes introducing an optical absorber material precursor gas into a chamber containing the workpiece, generating an RF oscillating toroidal plasma current in a reentrant path that includes a process zone overlying the workpiece by applying RF source power, so as to deposit a layer of an optical absorber material on the workpiece, and exposing the workpiece to optical radiation that is at least partially absorbed in the optical absorber layer.
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Citations
20 Claims
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1. A method of processing a workpiece, comprising:
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introducing an optical absorber material precursor gas into a chamber containing the workpiece;
generating an RF oscillating toroidal plasma current in a reentrant path that includes a process zone overlying said workpiece by applying RF source power, so as to deposit a layer of an optical absorber material on said workpiece;
exposing said workpiece to optical radiation that is at least partially absorbed in said optical absorber layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification