×

Infrared thermopile detector system for semiconductor process monitoring and control

  • US 20060263916A1
  • Filed: 07/27/2006
  • Published: 11/23/2006
  • Est. Priority Date: 05/08/2002
  • Status: Abandoned Application
First Claim
Patent Images

1. A detector system for semiconductor process monitoring comprising:

  • (a) a sampling region for a material;

    (b) an infrared radiation source constructed and arranged to transmit infrared radiation through the sampling region; and

    (c) a thermopile detector constructed and arranged to receive infrared radiation after the transmission thereof through the sampling region and to responsively generate an output signal correlative of material within said sampling region, wherein said detector system is adapted to receive said material into said sampling region from a semiconductor processing system to monitor and/or control said semiconductor process.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×