Method of forming integrated circuitry
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Accused Products
Abstract
The invention includes methods of forming integrated circuitry, methods of forming memory circuitry, and methods of forming field effect transistors. In one implementation, conductive metal silicide is formed on some areas of a substrate and not on others. In one implementation, conductive metal silicide is formed on a transistor source/drain region and which is spaced from an anisotropically etched sidewall spacer proximate a gate of the transistor.
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Citations
70 Claims
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1-51. -51. (canceled)
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52. A method of forming integrated circuitry comprising:
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providing a substrate comprising a first circuitry area and a second circuitry area, the first circuitry area comprising a first pair of spaced adjacent conductive structures received over the substrate in at least a first cross-section, the second circuitry area comprising a second pair of spaced adjacent conductive structures received over the silicon-comprising substrate in at least a second cross-section, the conductive structures of the second pair being spaced further from one another in the second cross-section than are those of the first pair in the first cross-section, first anisotropically etched insulative sidewall spacers being received over sidewalls of the conductive structures of the first and second pair;
depositing a masking material between the conductive structures of each of the first and second pairs; and
anisotropically etching the masking material effective to form sidewall spacers over the first anisotropically etched sidewall spacers of each of the conductive structures of the second pair and leave at least some of the masking material spanning between the first anisotropically etched sidewall spacers of each of the conductive structures of the first pair at the conclusion of said anisotropically etching. - View Dependent Claims (53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 65, 66, 67, 69)
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63-64. -64. (canceled)
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68. (canceled)
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70-82. -82. (canceled)
Specification