Low temperature plasma deposition process for carbon layer deposition
First Claim
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1. A method of depositing a carbon layer on a workpiece, comprising:
- placing the workpiece in a reactor chamber;
introducing a carbon-containing process gas into the chamber;
generating a reentrant toroidal RF plasma current in a reentrant path that includes a process zone overlying the workpiece by coupling plasma RF source power to an external portion of said reentrant path; and
coupling RF plasma bias power or bias voltage to the workpiece.
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Abstract
A method of depositing a carbon layer on a workpiece includes placing the workpiece in a reactor chamber, introducing a carbon-containing process gas into the chamber, generating a reentrant toroidal RF plasma current in a reentrant path that includes a process zone overlying the workpiece by coupling plasma RF source power to an external portion of the reentrant path, and coupling RF plasma bias power or bias voltage to the workpiece.
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Citations
20 Claims
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1. A method of depositing a carbon layer on a workpiece, comprising:
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placing the workpiece in a reactor chamber;
introducing a carbon-containing process gas into the chamber;
generating a reentrant toroidal RF plasma current in a reentrant path that includes a process zone overlying the workpiece by coupling plasma RF source power to an external portion of said reentrant path; and
coupling RF plasma bias power or bias voltage to the workpiece. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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