Lithographic apparatus and device manufacturing method utilizing FPD chuck Z position measurement
First Claim
Patent Images
1. A lithographic apparatus, comprising:
- a first frame, and a second frame, wherein the first frame and the second frame are moveable in a first direction relative to one another, the first frame being provided with a ruler having distance indicators disposed in the first direction for monitoring by an associated ruler monitoring sensor, and wherein the second frame is provided with a second sensor arranged to measure a distance between the second sensor and the ruler in a second direction orthogonal to the first direction, using the ruler as a reference surface.
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Abstract
A lithographic apparatus comprising a first frame and a second frame, the first frame and the second frame being moveable in a first direction relative to one another. The first frame is provided with a ruler having distance indicators disposed in the first direction for monitoring by an associated ruler monitoring sensor. The second frame is provided with a second sensor arranged to measure the distance between the second sensor and the ruler in a second direction orthogonal to the first direction, using the ruler as a reference surface.
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Citations
25 Claims
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1. A lithographic apparatus, comprising:
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a first frame, and a second frame, wherein the first frame and the second frame are moveable in a first direction relative to one another, the first frame being provided with a ruler having distance indicators disposed in the first direction for monitoring by an associated ruler monitoring sensor, and wherein the second frame is provided with a second sensor arranged to measure a distance between the second sensor and the ruler in a second direction orthogonal to the first direction, using the ruler as a reference surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A measurement apparatus, comprising:
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a ruler including distance indicators disposed in a first direction for monitoring by an associated ruler monitoring sensor; and
a second sensor that measures a distance between the second sensor and the ruler in a second direction orthogonal to the first direction, using the ruler as a reference surface. - View Dependent Claims (16)
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17. A method, comprising:
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(a) providing a substrate holder with a ruler having distance indicators disposed in a first direction;
(b) providing a frame with a height sensor that measures a height of a substrate held by the substrate holder;
(c) providing projection optics that project a desired pattern onto the substrate, (d) measuring a height of the ruler with a second sensor located adjacent to the height sensor;
(e) moving the substrate holder and substrate relative to the projection optics;
(f) measuring the height of the ruler using a third sensor located adjacent to the projection optics;
(g) determining a correction offset based upon the difference between the measured heights of the ruler; and
(h) using the correction offset together with the measured height of the substrate to adjust the projection optics, such that the projection optics project an in-focus pattern onto the substrate. - View Dependent Claims (18, 19, 20, 21)
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22. A method of lithographic exposure using a lithographic apparatus, comprising:
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(a) providing a first frame with a ruler having distance indicators disposed in a first direction;
(b) providing a second frame with a plurality of sensors that measure a distance between the plurality of sensors and the ruler in a second direction orthogonal to the first direction, using the ruler as a reference surface, (c) measuring a surface flatness of the ruler; and
(d) using the plurality of sensors to measure movement of the first frame relative to the second frame in the second direction, during scanning movement of the first frame relative to the second frame in the first direction. - View Dependent Claims (23, 24)
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25. A measurement method, comprising:
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(a) using a ruler having distance indicators disposed in a first direction for monitoring by an associated ruler monitoring sensor; and
(b) measuring with a sensor a distance between the sensor and the ruler in a second direction orthogonal to the first direction, using the ruler as a reference surface.
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Specification