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Lithographic apparatus and device manufacturing method utilizing FPD chuck Z position measurement

  • US 20060265889A1
  • Filed: 05/31/2005
  • Published: 11/30/2006
  • Est. Priority Date: 05/31/2005
  • Status: Active Grant
First Claim
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1. A lithographic apparatus, comprising:

  • a first frame, and a second frame, wherein the first frame and the second frame are moveable in a first direction relative to one another, the first frame being provided with a ruler having distance indicators disposed in the first direction for monitoring by an associated ruler monitoring sensor, and wherein the second frame is provided with a second sensor arranged to measure a distance between the second sensor and the ruler in a second direction orthogonal to the first direction, using the ruler as a reference surface.

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