High plasma utilization for remote plasma clean
First Claim
Patent Images
1. A chemical vapor deposition system for processing flat panel display substrates, comprising:
- a chemical vapor deposition chamber comprising;
a chamber body;
a substrate support; and
a gas distribution assembly;
wherein the chamber body defines a first inlet configured to provide reactive species from a remote plasma source into a processing region of the chemical vapor deposition chamber via the gas distribution assembly, and the chamber body defines one or more inlets configured to provide reactive species from the same or a different remote plasma source into the processing region of the chemical vapor deposition chamber while bypassing the gas distribution assembly.
1 Assignment
0 Petitions
Accused Products
Abstract
A method and apparatus for cleaning a chemical vapor deposition chamber are provided. The chemical vapor deposition chamber includes an inlet that introduces reactive species into the chamber from a remote plasma source while bypassing a gas distribution assembly of the chamber and an inlet that introduces reactive species from a remote plasma source into the chamber via the gas distribution assembly.
-
Citations
20 Claims
-
1. A chemical vapor deposition system for processing flat panel display substrates, comprising:
a chemical vapor deposition chamber comprising;
a chamber body;
a substrate support; and
a gas distribution assembly;
wherein the chamber body defines a first inlet configured to provide reactive species from a remote plasma source into a processing region of the chemical vapor deposition chamber via the gas distribution assembly, and the chamber body defines one or more inlets configured to provide reactive species from the same or a different remote plasma source into the processing region of the chemical vapor deposition chamber while bypassing the gas distribution assembly. - View Dependent Claims (2, 3, 4, 5, 6)
-
7. A chemical vapor deposition system for processing flat panel display substrates, comprising:
-
a first remote plasma source; and
a chemical vapor deposition chamber connected to the remote plasma source, the chemical vapor deposition chamber comprising;
a chamber body;
a substrate support; and
a gas distribution assembly;
wherein the chamber body defines a first inlet configured to provide reactive species from the first remote plasma source into a processing region of the chemical vapor deposition chamber via the gas distribution assembly, and the chamber body defines a second inlet configured to provide reactive species from the same or a different remote plasma source into the processing region of the chemical vapor deposition chamber while bypassing the gas distribution assembly. - View Dependent Claims (8, 9, 10, 11, 12)
-
-
13. A chemical vapor deposition system for processing flat panel display substrates, comprising:
-
a first remote plasma source;
a second remote plasma source;
a first chemical vapor deposition chamber connected to the first remote plasma source and the second remote plasma source, the first chemical vapor deposition chamber comprising;
a first chamber body;
a first substrate support; and
a first gas distribution assembly;
wherein the first chamber body defines a first inlet configured to provide reactive species from the first remote plasma source into a processing region of the first chemical vapor deposition chamber via the first gas distribution assembly, and the first chamber body defines a second inlet configured to provide reactive species from the second remote plasma source into the processing region of the first chemical vapor deposition chamber while bypassing the first gas distribution assembly; and
a second chemical vapor deposition chamber connected to the first remote plasma source and the second remote plasma source, the second chemical vapor deposition chamber comprising;
a second chamber body;
a second substrate support; and
a second gas distribution assembly;
wherein the second chamber body defines a first inlet configured to provide reactive species from the first remote plasma source into a processing region of the second chemical vapor deposition chamber via the second gas distribution assembly; and
the second chamber body defines a second inlet configured to provide reactive species from the second remote plasma source into the processing region of the second chemical vapor deposition chamber while bypassing the second gas distribution assembly. - View Dependent Claims (14, 15)
-
-
16. A method of cleaning a chemical vapor deposition chamber, comprising:
-
introducing reactive species from a remote plasma source into the chemical vapor deposition chamber through a first inlet configured to provide reactive species from the remote plasma source into a processing region of the chemical vapor deposition chamber via a gas distribution assembly of the chemical vapor deposition chamber; and
introducing reactive species from the same or a different remote plasma source into the processing region of the chemical vapor deposition chamber through a second inlet configured to provide reactive species from the same or a different remote plasma source into the processing region of the chemical vapor deposition chamber while bypassing the gas distribution assembly. - View Dependent Claims (17, 18, 19, 20)
-
Specification