Process analyzer for monitoring electrochemical deposition solutions
First Claim
1. A process analyzer for analyzing composition of at least one meta-containing solution, said process analyzer comprising at least one composite microelectrode having an dielectric layer formed by oxidation of a metal or metal alloy.
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Abstract
The present invention relates to process analyzers and processes employing same for analyzing composition of metal-containing samples such as electrochemical deposition solutions, wherein the analyzer includes at least one microelectrode, e.g. having a radius of not more than about 5 μm. The process analyzer preferably comprises: (1) two or more independent analytical modules, (2) a primary manifold communicatively connected to the analytical modules for introducing fluid samples thereinto, and (3) a computational device communicatively associated with the analytical modules for collecting and processing analytical data therefrom, to permit automatic and simultaneous analysis of multiple sample solutions.
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Citations
36 Claims
- 1. A process analyzer for analyzing composition of at least one meta-containing solution, said process analyzer comprising at least one composite microelectrode having an dielectric layer formed by oxidation of a metal or metal alloy.
- 17. A process comprising the step of monitoring the composition of at least one metal containing solution utilizing a process analyzer comprising at least one composite microelectrode having a dielectric layer formed by oxidation of a metal or metal alloy.
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28. A process comprising the steps of:
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supplying a plurality of samples to a process analyzer including a plurality of analytical modules for analyzing fluid samples, each module including at least one microelectrode having a composite structure including an inner electrically conductive metal core, and having an outer dielectric layer formed by oxidization of a metal or metal alloy; and
substantially simultaneously analyzing the plurality of samples using the plurality of analytical modules. - View Dependent Claims (29, 30, 31, 32, 33, 34, 35, 36)
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Specification