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Torsional electrostatic actuator

  • US 20060267449A1
  • Filed: 05/27/2005
  • Published: 11/30/2006
  • Est. Priority Date: 05/27/2005
  • Status: Active Grant
First Claim
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1. Apparatus comprising:

  • a first moveable plate electrode held offset from a substrate;

    a second moveable plate electrode held offset from said substrate;

    by at least a second spring that couples said second moveable plate electrode to a second support structure;

    a fixed plate electrode, said fixed plate electrode being flanked by said first and second moveable plate electrodes so that a voltage difference between said fixed plate electrode and said first moveable plate electrode causes movement of said first moveable plate electrode and a voltage difference between said fixed plate electrode and said second moveable plate electrode causes movement of said second moveable plate electrode;

    a first arm portion, coupled to said first moveable plate electrode and extending toward said second moveable plate electrode;

    a second arm portion, coupled to said second plate and extending toward said first moveable plate electrode; and

    a coupler coupling said first and second arms to each other.

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