Combined spatial filter and relay systems
First Claim
Patent Images
2. A combined spatial filter and relay system comprising:
- a) an aperture;
b) a flat mirror;
c) a concave spherical mirror having at least one concave spherical surface; and
d) a convex spherical mirror having at least one convex spherical surface;
said elements being arranged such that electromagnetic radiation from said aperture is caused to approach the flat mirror and reflect therefrom onto a first location of a concave surface of said concave spherical mirror, reflect from said first location onto a convex spherical surface of said convex spherical mirror and reflect therefrom onto a second location of said concave surface of said concave spherical mirror from which it reflects as a converging beam of electromagnetic radiation.
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Accused Products
Abstract
Low aberration relay systems modified to perform as spatial filters in reflectometer, spectrophotometer, ellipsometer, polarimeter and the like systems.
12 Citations
26 Claims
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2. A combined spatial filter and relay system comprising:
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a) an aperture;
b) a flat mirror;
c) a concave spherical mirror having at least one concave spherical surface; and
d) a convex spherical mirror having at least one convex spherical surface;
said elements being arranged such that electromagnetic radiation from said aperture is caused to approach the flat mirror and reflect therefrom onto a first location of a concave surface of said concave spherical mirror, reflect from said first location onto a convex spherical surface of said convex spherical mirror and reflect therefrom onto a second location of said concave surface of said concave spherical mirror from which it reflects as a converging beam of electromagnetic radiation. - View Dependent Claims (3, 13, 18)
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4. A combined spatial filter and relay system comprising five elements:
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a) an aperture;
b) a first flat mirror;
c) a concave spherical mirror having at least one concave spherical surface;
d) a convex spherical mirror having at least one convex spherical surface; and
e) a second flat mirror;
said elements being arranged such that electromagnetic radiation from said aperture is caused to approach the first flat mirror and reflect therefrom onto a first location of a concave surface of said concave spherical mirror, reflect from said first location onto a convex spherical surface of said convex spherical mirror and reflect therefrom onto a second location of said concave surface of said concave spherical mirror from which it reflects onto said second flat mirror positioned to intercept and reflect electromagnetic radiation reflected from said second location of said concave surface of said concave spherical mirror as a converging beam of electromagnetic radiation. - View Dependent Claims (5, 14, 19)
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6. A system for investigating a sample comprising:
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a source of electromagnetic radiation;
an aperture;
first and second relay systems, each thereof comprising four elements;
a) a first flat mirror;
b) a concave spherical mirror having at least one concave spherical surface;
c) a convex spherical mirror having at least one convex spherical surface; and
d) a second flat mirror;
said elements being arranged such that electromagnetic radiation is caused to approach the first flat mirror and reflect therefrom onto a first location of a concave surface of said concave spherical mirror, reflect from said first location onto a convex spherical surface of said convex spherical mirror and reflect therefrom onto a second location of said concave surface of said concave spherical mirror from which it reflects onto said second flat mirror positioned to intercept and reflect electromagnetic radiation reflected from said second location of said concave surface of said concave spherical mirror as a converging beam of electromagnetic radiation;
and a detector;
said sample being positioned between said first and second relay systems;
said first relay system being positioned to relay electromagnetic radiation from the source thereof, as it passes through said aperture, and direct it onto a surface of said sample at an oblique angle of incidence, and said second relay system being positioned to receive electromagnetic radiation reflected from the sample and pass it on to said detector;
the propagation direction of electromagnetic radiation entering and exiting each of said first and second relay systems being substantially unchanged by passing therethrough;
said system being further characterized in that a plane formed by the locus of the electromagnetic radiation passing through the first relay system is oriented 90 degrees to a plane formed by the locus of the electromagnetic radiation passing through the second relay system, the purpose being to minimize effects of said first and second relay systems on a polarization state of said electromagnetic radiation which passes through both thereof. - View Dependent Claims (7, 8, 15, 20)
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9. A system for investigating a sample comprising:
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a source of electromagnetic radiation;
an aperture;
first and second relay systems, each thereof comprising four elements;
a) a first flat mirror;
b) a concave spherical mirror having at least one concave spherical surface;
c) a convex spherical mirror having at least one convex spherical surface; and
d) a second flat mirror;
said elements being arranged such that electromagnetic radiation is caused to approach the first flat mirror and reflect therefrom onto a first location of a concave surface of said concave spherical mirror, reflect from said first location onto a convex spherical surface of said convex spherical mirror and reflect therefrom onto a second location of said concave surface of said concave spherical mirror from which it reflects onto said second flat mirror positioned to intercept and reflect electromagnetic radiation reflected from said second location of said concave surface of said concave spherical mirror as a converging beam of electromagnetic radiation;
and a detector;
said first and second relay systems being positioned on the same side of the sample;
the propagation direction of electromagnetic radiation entering and exiting each of said first and second relay systems being substantially unchanged by passing therethrough;
said system being further characterized in that a plane formed by the locus of the electromagnetic radiation passing through the first relay system is oriented 90 degrees to a plane formed by the locus of the electromagnetic radiation passing through the second relay system, the purpose being to minimize effects of said first and second relay systems on a polarization state of said electromagnetic radiation which passes through both thereof. - View Dependent Claims (10, 11, 16, 21)
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22. A system for investigating a sample comprising:
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a source of electromagnetic radiation;
an aperture;
a relay system comprising three elements;
a) a flat mirror;
b) a concave spherical mirror having at least one concave spherical surface;
c) a convex spherical mirror having at least one convex spherical surface;
said elements being arranged such that electromagnetic radiation is caused to approach the flat mirror and reflect therefrom onto a first location of a concave surface of said concave spherical mirror, reflect from said first location onto a convex spherical surface of said convex spherical mirror and reflect therefrom onto a second location of said concave surface of said concave spherical mirror from which it reflects as a converging beam of electromagnetic radiation;
a sample; and
a detector. - View Dependent Claims (1, 12, 17, 23, 24, 25, 26)
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23-1. A system for investigating a sample as in claim 22 which further comprises:
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a) a polarizer between said source and sample; and
b) an analyzer between said sample and detector;
wherein said system is an ellipsometer.
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Specification