Yokeless Hidden Hinge Digital Micromirror Device with Double Binge Layer

• US 20060268391A1
• Filed: 08/07/2006
• Published: 11/30/2006
• Est. Priority Date: 01/31/2002
• Status: Active Grant

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: DiCarlo, Anthony
• Granted Patent: US 7,483,199 B2
• Time in Patent Office: Days
• US Class Current: 359/291
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: Y10S 359/904 Micromirror

Abstract

A micromirror array 110 fabricated on a semiconductor substrate 11. The array 110 is comprised of four operating layers 12, 13, 14, 15. An addressing layer 12 is fabricated on the substrate. A raised electrode layer 13 is spaced above the addressing layer by an air gap. A hinge layer 14 is spaced above the raised electrode layer 13 by another air gap. A mirror layer 15 is spaced over the hinge layer 14 by a third air gap.

Claims

1-18. -18. (canceled)

19. A display system, comprising:

a light source for producing a light beam along a light path; and

a micromirror device in the light path for selectively reflecting portions of the light beam along a second light path toward an image plane, the micromirror device comprising;

a substrate having electrical components fabricated on the surface of the substrate;

an array of mirror elements, each element comprising a reflective mirror, a hinge under the mirror spaced under the mirror by an air gap and mechanically connected to the mirror such that the mirror may tilt above the hinge, at least two raised electrodes spaced under the hinge, and an address layer spaced under the address electrodes and in electrical connection with the electrical components of the substrate.

20. The display system of claim 19, further comprising spring tips mechanically connected to and spaced above the address layer, such that the mirror may land on the spring tips.