Method and radiation source for generating pulsed coherent radiation
First Claim
1. Method of generating pulsed coherent radiation, comprising the step of:
- generating high harmonic pulses by an interaction of laser light pulses with a non-linear medium contained in a resonant cavity, wherein the non-linear medium is arranged in an environment of reduced pressure.
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Abstract
A method of generating pulsed coherent radiation, comprises the step of generating high harmonic pulses by an interaction of laser light pulses with a non-linear medium contained in a resonant cavity, wherein the non-linear medium is arranged in an environment of reduced pressure. Furthermore, a radiation source of generating pulsed coherent radiation is described, comprising a laser pulse source for generating laser light pulses, a resonant cavity including a non-linear medium for generating high harmonic pulses by an interaction of the laser light pulses with the non-linear medium, wherein the non-linear medium is arranged in an environment of reduced pressure.
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31 Claims
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1. Method of generating pulsed coherent radiation, comprising the step of:
generating high harmonic pulses by an interaction of laser light pulses with a non-linear medium contained in a resonant cavity, wherein the non-linear medium is arranged in an environment of reduced pressure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. Radiation source of generating pulsed coherent radiation, comprising:
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a laser pulse source for generating laser light pulses, and a resonant cavity including a non-linear medium for generating high harmonic pulses by an interaction of the laser light pulses with the non-linear medium, wherein the non-linear medium is arranged in an environment of reduced pressure. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
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Specification