Position detection apparatus and exposure apparatus
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Abstract
An exposure apparatus for exposing an object to light. The apparatus includes a camera which captures an image of a mark on the object to obtain image data corresponding to the image, an extraction section which extracts an edge position in the image data obtained by differentiating the image data, a determination section which determines a position of the mark by comparing the extracted edge position with a template, and a control section which changes at least one of a parameter used by the extraction section and a parameter used by the determination section, based on a result of the comparing by the determination section. The object to be exposed is positioned based upon the position of the mark determined by the determination section.
26 Citations
48 Claims
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1-36. -36. (canceled)
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37. An exposure apparatus for exposing an object to light, said apparatus comprising:
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a camera which captures an image of a mark on the object to obtain image data corresponding to the image;
an extraction section which extracts an edge position in the image data obtained by differentiating the image data;
a determination section which determines a position of the mark by comparing the extracted edge position with a template; and
a control section which changes at least one of a parameter used by said extraction section and a parameter used by said determination section, based on a result of the comparing by said determination section, wherein the object to be exposed is positioned based upon the position of the mark determined by said determination section. - View Dependent Claims (38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48)
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Specification