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Reactively formed integrated capacitors on organic substrates and fabrication methods

  • US 20060269762A1
  • Filed: 02/27/2006
  • Published: 11/30/2006
  • Est. Priority Date: 03/02/2005
  • Status: Abandoned Application
First Claim
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1. A capacitor integrated onto a substrate or foil formed by:

  • reacting a metal or precursor layer using a hydrothermal reaction, thermal oxidation or solid-state reaction with a deposited layer, to create a high dielectric constant film on the substrate that comprises the integrated capacitor.

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