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Triple alignment substrate method and structure for packaging devices

  • US 20060270179A1
  • Filed: 05/31/2005
  • Published: 11/30/2006
  • Est. Priority Date: 05/31/2005
  • Status: Active Grant
First Claim
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1. A method of aligning multiple substrates, the method comprising:

  • providing a handle substrate;

    providing a spacer substrate;

    forming a plurality of first alignment marks on a first surface of the handle substrate;

    forming a plurality of self-limiting alignment marks on a first surface of the spacer substrate;

    forming a plurality of openings in the spacer substrate, each of the plurality of openings surrounded by standoff regions;

    aligning the first surface of the handle substrate and the first surface of the spacer substrate using the first alignment marks and the self-limiting alignment marks; and

    bonding the handle substrate to the spacer substrate to form a composite substrate structure.

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