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Alignment shield for evaporator used in thin film deposition

  • US 20060270243A1
  • Filed: 05/24/2005
  • Published: 11/30/2006
  • Est. Priority Date: 05/24/2005
  • Status: Abandoned Application
First Claim
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1. An system for depositing film, comprising:

  • a substrate holder assembly for holding a plurality of substrates;

    a particle source for generating particles toward the substrate holder assembly;

    an alignment shield between the particle source and the substrate holder assembly, the alignment shield comprising a plurality of individually adjustable alignment cells, each alignment cell being adjustable to provide a corresponding deposition angle to one corresponding substrate; and

    a vacuum chamber enclosing the substrate holder assembly, the particle source, and the alignment shield.

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