Alignment shield for evaporator used in thin film deposition
First Claim
1. An system for depositing film, comprising:
- a substrate holder assembly for holding a plurality of substrates;
a particle source for generating particles toward the substrate holder assembly;
an alignment shield between the particle source and the substrate holder assembly, the alignment shield comprising a plurality of individually adjustable alignment cells, each alignment cell being adjustable to provide a corresponding deposition angle to one corresponding substrate; and
a vacuum chamber enclosing the substrate holder assembly, the particle source, and the alignment shield.
1 Assignment
0 Petitions
Accused Products
Abstract
A system for depositing film includes (1) a substrate holder assembly, (2) a particle source, (3) an alignment shield between the particle source and the substrate holder assembly, and (4) a vacuum chamber for enclosing the substrate holder assembly, the particle source, and the alignment shield. The alignment shield includes alignment cells each having walls that can be individually adjusted to change the oblique deposition angles. By adjusting the walls of the alignment cells, uniform oblique deposition angles can be achieved on substrates held by the substrate holder assembly. The deposited film with uniform orientation can be used as the alignment layer of a liquid crystal display.
9 Citations
14 Claims
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1. An system for depositing film, comprising:
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a substrate holder assembly for holding a plurality of substrates;
a particle source for generating particles toward the substrate holder assembly;
an alignment shield between the particle source and the substrate holder assembly, the alignment shield comprising a plurality of individually adjustable alignment cells, each alignment cell being adjustable to provide a corresponding deposition angle to one corresponding substrate; and
a vacuum chamber enclosing the substrate holder assembly, the particle source, and the alignment shield. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method for forming alignment layers on substrates, comprising:
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adjusting a plurality of alignment cells on an alignment shield to provide proper deposition angles on a plurality of substrates held by a substrate holder assembly, wherein each alignment cell is adjusted for one substrate; and
generating particles with a particle source toward the substrates, wherein the particles pass through the alignment cells and deposits on the substrates. - View Dependent Claims (11, 12, 13, 14)
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Specification