MICROVALVE PACKAGE ASSEMBLY

• US 20060272718A1
• Filed: 06/03/2005
• Published: 12/07/2006
• Est. Priority Date: 06/03/2005
• Status: Active Grant

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Schwichtenberg, Jay G., Cabuz, Eugen I.
• Granted Patent: US 7,320,338 B2
• Time in Patent Office: Days
• US Class Current: 137/884
• CPC Class Codes: F15C 5/00 Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
• CPC Class Codes: Y10T 137/7668 Retained by bonnet or closure
• CPC Class Codes: Y10T 137/87885 Sectional block structure

Abstract

A microvalve assembly that can help protect a microvalve or an assembly of microvalves from the environment. Such a microvalve assembly may be mechanically assembled, without the use of adhesives and/or other materials that might out-gas and/or otherwise reduce the performance of the electrostatically actuated devices contained therein. In particular, a microvalve assembly can include a base fixture, a clamp fixture that is configured to be attached to the base fixture, and an electrostatically actuated microvalve that is disposed between the base fixture and the clamp fixture. The clamp fixture may be mechanically secured to the base fixture.

Claims

1. A microvalve assembly, comprising:

a base fixture;

a clamp fixture; and

an electrostatically activated microvalve disposed between the base fixture and the clamp fixture;

wherein the clamp fixture is mechanically secured to the base fixture without an adhesive.

2. The microvalve assembly of claim 1, further comprising a gasket situation between the electrostatically activated microvalve and the clamp fixture.

3. The microvalve assembly of claim 1, wherein the base fixture comprises a recessed clamp fixture receiving region complementary in size and shape to the clamp fixture, such that the clamp fixture fits at least substantially into the recessed clamp fixture receiving region.

4. The microvalve assembly of claim 3, wherein the recessed clamp fixture receiving region comprises a recessed microvalve receiving region.

5. The microvalve assembly of claim 4, wherein the clamp fixture comprises a raised microvalve receiving region that, when the clamp fixture is positioned into the base fixture, at least substantially aligns with the recessed microvalve receiving region.

6. The microvalve assembly of claim 5, wherein the raised microvalve receiving region comprises a gasket receiving recess.

7. The microvalve assembly of claim 6, further comprising a gasket disposed at least partially within the gasket receiving recess.

8. The microvalve assembly of claim 1, wherein the electrostatically actuated microvalve comprises a valve aperture member comprising a valve aperture and a valve flap member comprising a flap overlying the valve aperture.

9. The microvalve assembly of claim 8, wherein the base fixture further comprises an inlet in fluid communication with the valve aperture.

10. The microvalve assembly of claim 5, wherein the raised microwave receiving region defines a fluid receiving volume.

11. The microvalve assembly of claim 10, wherein the clamp fixture further comprises an outlet in fluid communication with the fluid receiving volume.

12. The microvalve assembly of claim 1, wherein the clamp fixture further comprises a clamp fixture securement aperture.

13. The microvalve assembly of claim 12, wherein the base fixture further comprises a base fixture securement aperture at least substantially aligned with the clamp fixture securement aperture.

14. The microvalve assembly of claim 13, further comprising a securement device positioned within the clamp fixture securement aperture and the base fixture securement aperture, thereby securing the clamp fixture to the base fixture.

15. The microvalve assembly of claim 14, wherein the securement device secures the clamp fixture to the base fixture without adhesives.

16. The microvalve assembly of claim 14, wherein the base fixture securement aperture comprises a threaded recess and the securement device comprises a threaded securement disposed through the clamp fixture securement aperture and threadedly engaged with the threaded recess.

17. The microvalve assembly of claim 14, wherein the securement device comprises a rod that is friction fit within the base fixture securement aperture and the clamp fixture securement aperture.

18. A microvalve assembly, comprising:

a base fixture;

a clamp fixture inset into the base fixture;

an electrostatically activated microvalve disposed between the base fixture and the clamp fixture; and

a gasket disposed between the electrostatically activated microvalve and the clamp fixture

wherein the clamp fixture is mechanically secured to the base fixture.

19. The microvalve assembly of claim 18, wherein the base fixture further comprises a fluid inlet.

20. The microvalve assembly of claim 18, wherein the clamp fixture further comprises a fluid outlet

21. A microvalve assembly, comprising:

a base fixture comprising a recessed clamp fixture receiving region and a recessed microvalve receiving region disposed within the recessed clamp fixture receiving region;

a clamp fixture configured to fit at least substantially into the recessed clamp receiving region of the base fixture, the clamp fixture comprising a raised microvalve receiving region at least substantially aligned with the recessed microvalve receiving region of the base fixture; and

an array of electrostatically activated microvalves disposed between the base fixture and the clamp fixture;

wherein the clamp fixture is mechanically secured to the base fixture without adhesives.

22. The microvalve assembly of claim 21, wherein the raised microvalve receiving region comprises a plurality of gasket receiving recesses.

23. The microvalve assembly of claim 22, further comprising a plurality of gaskets disposed at least partially within the plurality of gasket receiving recesses.

24. The microvalve assembly of claim 21, further comprising a plurality of inputs and a plurality of outputs, each of the plurality of inputs and each of the plurality of outputs in fluid communication with one of the plurality of electrostatically actuated microvalves.