Electrochemical microfluidic sensor and method of creation of its microchannels by embossing
First Claim
1. A sensor comprising a microfluidic channel and an electronic sensing device on a first substrate, and a second substrate bonded to the first substrate so as to close the microfluidic channel, wherein a functional part of the electronic sensing device is exposed at the surface of the microfluidic channel.
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Abstract
An electrochemical sensor and method of its production comprising a microfluidic channel and an electronic sensing device on a first substrate, and a second substrate bonded to the first substrate so as to close the microfluidic channel, wherein a functional part of the electronic sensing device is exposed at the surface of the microfluidic channel and wherein the microfluidic channel is formed by embossing. In one embodiment the electronic device is a vertical-channel field-effect transistor.
73 Citations
47 Claims
- 1. A sensor comprising a microfluidic channel and an electronic sensing device on a first substrate, and a second substrate bonded to the first substrate so as to close the microfluidic channel, wherein a functional part of the electronic sensing device is exposed at the surface of the microfluidic channel.
- 22. A sensor comprising a first organic substrate having a microfluidic channel and an electronic sensing device located therein, and a second substrate bonded to the first substrate so as to close the microfluidic channel.
- 30. A sensor comprising a microfluidic channel and a pair of electrodes of an electronic sensing device, wherein the microfluidic channel and the pair of electrodes are defined in a single operation.
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42. A method for producing a sensor, the method comprising the steps of:
- forming a body comprising an electrically conductive layer; and
embossing the body to define a microfluidic channel and a pair of electrodes, the pair of electrodes being exposed at the surface of the channel. - View Dependent Claims (43, 44, 45, 46)
- forming a body comprising an electrically conductive layer; and
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47. A sensor comprising a microfluidic channel and an electronic sensing device, wherein an insulating part of the electronic sensing device is exposed at the surface of the microfluidic channel.
Specification