LIGHT EMITTING DIODE AND METHOD OF FABRICATING THEREOF
First Claim
1. A light emitting diode, comprising a substrate and an epitaxial structure disposed on the substrate, wherein comprising:
- a surface of the epitaxial structure having a plurality of mass transferred patterns, forming the mass transferred patterns by means of a mass transfer method undergoing deformations of the original rough surface of the epitaxial structure, wherein a surface topography of the mass transferred pattern is smoother and more gradual than a surface topography of the original surface of the epitaxial structure.
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Abstract
A light emitting diode (LED) is made of a substrate and an epitaxial structure. A surface of the epitaxial structure has many mass transferred patterns. The mass transferred patterns are formed by a mass transfer method to deform an original rough surface of the epitaxial structure. The surface topography of the mass transferred patterns is smoother and more gradual than that of the original rough surface of the epitaxial structure, and thus the light extraction efficiency of the LED is improved. In addition, the issue of instrument detection errors related to device positioning due to the roughness or the patterns of the LED surface can be reduced.
42 Citations
33 Claims
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1. A light emitting diode, comprising a substrate and an epitaxial structure disposed on the substrate, wherein comprising:
a surface of the epitaxial structure having a plurality of mass transferred patterns, forming the mass transferred patterns by means of a mass transfer method undergoing deformations of the original rough surface of the epitaxial structure, wherein a surface topography of the mass transferred pattern is smoother and more gradual than a surface topography of the original surface of the epitaxial structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A fabrication method for a light emitting diode, comprising providing an epitaxial structure on a substrate, wherein a surface of the epitaxial structure has a plurality of first patterns;
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undergoing deformation to the first pattern of the surface and forming a plurality of second patterns using a mass transfer method, wherein a surface topography of each of the second pattern is smoother and more gradual than a surface topography of each of the first pattern. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33)
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Specification