Trenched MOSFET device with contact trenches filled with tungsten plugs
First Claim
1. A trenched semiconductor power device comprising a trenched gate disposed in an extended continuous trench surrounding a plurality of transistor cells in an active cell area and extending as trench-gate fingers to intersect with a trenched gate underneath gate runner metal near a termination area, wherein:
- at least one of said trench-gate fingers intersect with said trenched gate underneath gate runner metal in said termination area having trench intersection regions vulnerable to have a polysilicon void developed therein; and
at least a gate contact trench opened through an insulation layer covering said semiconductor power device wherein said gate contact trench penetrating from said insulation layer and extending into a trench-filling material in said trenched gate underneath gate runner metal and said gate contact trench is opened in an area away from said trench intersection regions.
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Accused Products
Abstract
A trenched semiconductor power device that includes a trenched gate disposed in an extended continuous trench surrounding a plurality of transistor cells in an active cell area and extending as trench-gate fingers to intersect with a trenched gate under the gate metal runner at a termination area. At least one of the trench-gate fingers intersects with the trenched gate under the gate metal runner near the termination area having trench intersection regions vulnerable to have a polysilicon void developed therein. At least a gate contact trench opened through an insulation layer covering the semiconductor power device wherein the gate contact trench penetrating from the insulation layer and extending into the gate polysilicon and the gate contact trench is opened in an area away from the trench intersection regions.
53 Citations
31 Claims
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1. A trenched semiconductor power device comprising a trenched gate disposed in an extended continuous trench surrounding a plurality of transistor cells in an active cell area and extending as trench-gate fingers to intersect with a trenched gate underneath gate runner metal near a termination area, wherein:
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at least one of said trench-gate fingers intersect with said trenched gate underneath gate runner metal in said termination area having trench intersection regions vulnerable to have a polysilicon void developed therein; and
at least a gate contact trench opened through an insulation layer covering said semiconductor power device wherein said gate contact trench penetrating from said insulation layer and extending into a trench-filling material in said trenched gate underneath gate runner metal and said gate contact trench is opened in an area away from said trench intersection regions. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A trenched semiconductor power device comprising a trenched gate surrounded by a source region encompassed in a body region above a drain region disposed on a bottom surface of a substrate, wherein said semiconductor power device further comprising:
at least two contact trenches opened through an insulation layer covering said semiconductor device wherein said contact trenches extending into a trench-filling material of said trenched gate and said body region and filled with a gate contact plug and a source contact plug for electrically contact respectively to a gate metal and a source metal disposed on top of said insulation layer wherein said gate metal and source metal further include a pattern recognition mark for wire bonding. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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29. A method for fabricating a trenched semiconductor power device comprising steps of forming a trenched gate as an extended continuous trench surrounding a plurality of transistor cells in an active cell area and extending as trench-gate fingers to intersect with a trenched gate underneath gate runner metal near a termination area having a trench intersection region and forming each of said transistor cells surrounded by said trenched gate with a body region encompassing a source region therein with a drain region formed on a bottom surface of a substrate, said method further comprising:
forming an overlying insulation layer and opening at least a gate contact trench penetrating through said insulation layer and extending into a trench-filling material in said trenched gate under gate runner metal by opening said gate contact trench in an area away from said trench intersection region to prevent a vulnerability to a polysilicon void developed in said trench intersection region. - View Dependent Claims (30, 31)
Specification