Display device, method of manufacturing the same and mask for manufacturing the same
First Claim
1. A mask for patterning a photoresist film covering a signal input unit having an output terminal and a storage electrode, the mask comprising:
- a mask body;
a first exposing part on the mask body, the first exposing part comprising;
a first light transmitting portion for exposing a portion of the photoresist film corresponding to the output terminal to a light of a first light amount; and
a plurality of second light transmitting portions for exposing an adjacent portion of the photoresist film adjacent to the output terminal to a light of a second light amount that is smaller than the first light amount; and
a second exposing part on the mask body, the second exposing part comprising a plurality of third light transmitting portions for exposing a portion of the photoresist film corresponding to the storage electrode to a light of a third light amount that is between the first and second light amounts.
2 Assignments
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Accused Products
Abstract
A mask is provided. The mask includes a mask body, a first exposing part and a second exposing part. The first exposing part is on the mask body. The first exposing part includes a first light transmitting portion and second light transmitting portions. The first light transmitting portion exposes a portion of the photoresist film corresponding to the output terminal to a light of a first light amount. The second light transmitting portions exposes an adjacent portion of the photoresist film adjacent to the output terminal to a light of a second light amount smaller than the first light amount. The second exposing part is on the mask body. The second exposing part includes third light transmitting portions for partially exposing the photoresist film corresponding to the storage electrode to a light of a third light amount that is between the first and second light amounts.
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Citations
47 Claims
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1. A mask for patterning a photoresist film covering a signal input unit having an output terminal and a storage electrode, the mask comprising:
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a mask body;
a first exposing part on the mask body, the first exposing part comprising;
a first light transmitting portion for exposing a portion of the photoresist film corresponding to the output terminal to a light of a first light amount; and
a plurality of second light transmitting portions for exposing an adjacent portion of the photoresist film adjacent to the output terminal to a light of a second light amount that is smaller than the first light amount; and
a second exposing part on the mask body, the second exposing part comprising a plurality of third light transmitting portions for exposing a portion of the photoresist film corresponding to the storage electrode to a light of a third light amount that is between the first and second light amounts. - View Dependent Claims (2, 3)
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4. A mask for patterning a photoresist film covering a signal input unit having an output terminal and a storage electrode, the mask comprising:
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a mask body;
a slit exposing part on the mask body, the slit exposing part comprising a plurality of slits corresponding to the output terminal; and
a translucent part on the mask body for partially removing the photoresist film. - View Dependent Claims (5, 6)
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7. A display device comprising:
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a storage electrode pattern on a substrate;
a dielectric layer on the storage electrode pattern;
a signal output unit on the dielectric layer, the signal output unit comprising an output terminal that outputs a data signal based on a timing signal;
a dielectric pattern on the dielectric layer, the dielectric pattern having a first contact hole through which the output terminal is partially exposed;
an insulating pattern on the dielectric layer, the signal output unit and the dielectric pattern, the insulating pattern having a second contact hole corresponding to the first contact hole and a third contact hole through which the dielectric pattern corresponding to the storage electrode pattern is partially exposed; and
a pixel electrode electrically connected to the output terminal, the pixel electrode comprising a storage electrode portion corresponding to the storage electrode pattern. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A display device comprising:
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a storage electrode pattern interposed between a substrate and a dielectric layer on the substrate;
a signal output unit on the dielectric layer, the signal output unit including an output terminal that outputs a data signal based on a timing signal;
a dielectric pattern on the dielectric layer, the dielectric pattern having a first contact hole through which the output terminal is partially exposed and a surface increasing part corresponding to the storage electrode pattern;
an insulating pattern on the dielectric layer, the signal output unit and the dielectric pattern, the insulating pattern having a second contact hole corresponding to the first contact hole and a third contact hole through which the surface increasing part is partially exposed; and
a pixel electrode electrically connected to the output terminal, the pixel electrode including a storage electrode portion on the surface increasing part corresponding to the storage electrode pattern. - View Dependent Claims (20, 21, 22, 23)
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24. A method of manufacturing a display device comprising:
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forming a storage electrode pattern on a substrate;
forming an output terminal to which an image signal is applied on a first dielectric layer that covers the storage electrode pattern;
forming a second dielectric layer and an insulating layer on the first dielectric layer having the output terminal;
patterning the insulating layer and the second dielectric layer so that a portion of the second dielectric layer corresponding to the output terminal is exposed, and a remaining portion of the insulating layer corresponding to the storage electrode pattern remains on a portion of the second dielectric layer corresponding to the storage electrode pattern;
partially removing the exposed second dielectric layer and the remaining portion of the insulating layer to form a first contact hole through which the output terminal is partially exposed and a second contact hole in the second dielectric layer corresponding to the storage electrode pattern; and
forming a pixel electrode on the insulating layer, the pixel electrode being electrically connected to the output terminal through the first contact hole, and corresponding to the storage electrode pattern in the second contact hole. - View Dependent Claims (25, 26, 27, 28, 29, 30, 31, 32, 33)
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34. A method of manufacturing a display device comprising:
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forming a first signal maintaining portion between a substrate and a first dielectric layer on the substrate;
forming an output terminal on the first dielectric layer;
forming a second dielectric layer and an insulating layer on the first dielectric layer and the output terminal;
patterning the insulating layer to form a first contact hole through which a portion of the second dielectric layer corresponding to the output terminal is partially exposed and a stepped pattern corresponding to the first signal maintaining portion;
patterning the second dielectric layer to form a second contact hole through which the output terminal is partially exposed and an embossed pattern corresponding to the stepped pattern; and
forming a pixel electrode electrically connected to the output terminal, the pixel electrode comprising a second signal maintaining portion that covers the embossed pattern. - View Dependent Claims (35, 36, 37, 38, 39, 40)
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41. A method of manufacturing a display device comprising:
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forming a first signal maintaining portion between a substrate and a first dielectric layer on the substrate and an output terminal on the first dielectric layer;
forming a second dielectric layer and an insulating layer on the first dielectric layer and the output terminal;
patterning the insulating layer to form a first contact hole through which a portion of the second dielectric layer corresponding to the output terminal is partially exposed and a plurality of insulating patterns corresponding to the first signal maintaining portion, the insulating patterns having different heights;
patterning the second dielectric layer to form a second contact hole through which the output terminal is partially exposed;
patterning the second and first dielectric layers to form an embossed pattern corresponding to the insulating patterns; and
forming a pixel electrode electrically connected to the output terminal, the pixel electrode comprising a second signal maintaining portion that covers the embossed pattern. - View Dependent Claims (42, 43, 44)
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45. A method of manufacturing a display device comprising:
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forming a storage electrode pattern, a first dielectric layer covering the storage electrode pattern, an output terminal outputting a data signal, a second dielectric layer covering the output terminal and an insulating layer on the second dielectric layer on a substrate;
aligning a mask including a slit exposing part having a plurality of slits and a translucent part corresponding to the storage electrode pattern on the insulating layer;
patterning the insulating layer and the second dielectric layer using the slit exposing part and the translucent part so that a portion of the second dielectric layer corresponding to the output terminal is exposed, and a remaining portion of the insulating layer corresponding to the storage electrode pattern remains on a portion of the second dielectric layer corresponding to the storage electrode pattern;
partially removing the exposed second dielectric layer and the remaining portion of the insulating layer to form a contact hole through which the output terminal is partially exposed and to expose a portion of the second dielectric layer corresponding to the storage electrode pattern; and
forming a pixel electrode on the insulating layer, the pixel electrode being electrically connected to the output terminal through the contact hole, and corresponding to the storage electrode pattern in the second contact hole. - View Dependent Claims (46, 47)
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Specification