Co-planar surface and torsion device mirror structure and method of manufacture for optical displays
First Claim
1. A spatial light modulator, the spatial light modulator comprising:
- a first substrate comprising a plurality of electrically activated electrodes and a bias grid;
a standoff structure coupled to the first substrate, the standoff structure comprising;
a central portion projecting to a first height above the first substrate, and an extension portion projecting to a second height above the first substrate, the second height being less than the first height; and
a mirror plate comprising;
a central contact structure integrally formed with the central portion of the standoff structure, a torsion beam coplanar with the central contact structure and free from contact with the standoff structure, and a reflective surface coupled to the torsion beam and free from contact with the standoff structure.
1 Assignment
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Accused Products
Abstract
A spatial light modulator is provided. The spatial light modulator includes a first substrate comprising a plurality of electrically activated electrodes and a bias grid and a standoff structure coupled to the first substrate. The standoff structure includes a central portion projecting to a first height above the first substrate and an extension portion projecting to a second height above the first substrate, the second height being less than the first height. The spatial light modulator also includes a mirror plate comprising a central contact structure integrally formed with the central portion of the standoff structure, a torsion beam coplanar with the central contact structure and free from contact with the standoff structure, and a reflective surface coupled to the plurality of torsion arms and free from contact with the standoff structure.
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Citations
22 Claims
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1. A spatial light modulator, the spatial light modulator comprising:
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a first substrate comprising a plurality of electrically activated electrodes and a bias grid;
a standoff structure coupled to the first substrate, the standoff structure comprising;
a central portion projecting to a first height above the first substrate, and an extension portion projecting to a second height above the first substrate, the second height being less than the first height; and
a mirror plate comprising;
a central contact structure integrally formed with the central portion of the standoff structure, a torsion beam coplanar with the central contact structure and free from contact with the standoff structure, and a reflective surface coupled to the torsion beam and free from contact with the standoff structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A micro-mirror flexibly supported by a standoff structure, the micro-mirror comprising:
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a mirror layer having an upper surface adapted to reflect incident radiation and a lower surface opposite the upper surface;
a first portion of the standoff structure integrally formed with the mirror layer comprising;
a first planar interface coupled to the lower surface of the mirror layer;
a second planar interface opposite the first planar interface; and
a body section extending along a first axis from the first planar interface to the second planar interface;
a second portion of the standoff structure extending along a second axis perpendicular to the first axis, the second portion comprising;
an upper surface physically separated from the plane of the first planar interface by a first distance;
a lower surface coplanar with the second planar interface; and
a body section extending along the first axis; and
a substrate coupled to the second planar interface of the first portion of the standoff structure and to the lower surface of the second portion of the standoff structure. - View Dependent Claims (11, 12, 13, 14)
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15. A method of fabricating a spatial light modulator, the method comprising:
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providing a first substrate structure comprising a plurality of layers;
forming a standoff structure in a first layer selected from the plurality of layers of the first substrate structure;
providing a second substrate comprising a bonding surface and a support surface;
joining the standoff structure to the bonding surface of the second substrate;
removing at least a second layer selected from the plurality of layers of the first substrate structure;
selectively patterning the first layer of the first substrate structure to form a micro-mirror; and
selectively patterning the first layer to remove a portion of the standoff structure and form a torsion spring hinge co-planar with the micro-mirror. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22)
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Specification