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Interferometric modulator with internal polarization and drive method

  • US 20060274398A1
  • Filed: 06/03/2005
  • Published: 12/07/2006
  • Est. Priority Date: 06/03/2005
  • Status: Active Grant
First Claim
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1. A method of forming a microelectromechanical systems (MEMS) device having a first electrode and a second electrode, the method comprising:

  • providing a first layer located between the first and second electrodes; and

    applying heat to the first layer while applying a first voltage across the first and second electrodes.

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