METHODS FOR FABRICATING OPTICAL MICROSTRUCTURES USING A CYLINDRICAL PLATFORM AND A RASTERED RADIATION BEAM
First Claim
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1. A method of fabricating optical microstructures comprising:
- rotating a cylindrical platform that includes a radiation sensitive layer thereon about an axis thereof, while simultaneously axially rastering a radiation beam across a portion of the radiation sensitive layer; and
while simultaneously continuously translating the cylindrical platform and/or radiation beam axially relative to one another, to image the optical microstructures in a spiral pattern in the radiation sensitive layer.
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Abstract
Optical microstructures, such as microlenses, are fabricated by rotating a cylindrical platform that includes a radiation sensitive layer thereon, about its axis, while simultaneously axially rastering a laser beam across at least a portion of the radiation sensitive layer. The cylindrical platform is also simultaneously translated axially while it is being rotated. The amplitude of the laser beam is continuously varied while rastering. The optical microstructures that are imaged in the radiation sensitive layer can be developed to provide a master for replicating a microlenses.
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Citations
36 Claims
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1. A method of fabricating optical microstructures comprising:
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rotating a cylindrical platform that includes a radiation sensitive layer thereon about an axis thereof, while simultaneously axially rastering a radiation beam across a portion of the radiation sensitive layer; and
whilesimultaneously continuously translating the cylindrical platform and/or radiation beam axially relative to one another, to image the optical microstructures in a spiral pattern in the radiation sensitive layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
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27. A method of fabricating optical microstructures comprising:
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rotating a cylindrical platform that includes a radiation sensitive layer thereon about an axis thereof, while simultaneously axially rastering a laser beam across a portion of the radiation sensitive layer while continuously varying amplitude of the laser beam; and
whilesimultaneously translating the cylindrical platform and/or laser beam axially relative to one another, to image the optical microstructures in the radiation sensitive layer. - View Dependent Claims (28, 29, 30, 31, 32, 33, 34, 35, 36)
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Specification