Exhaust Filter Module, and a Method and Apparatus for Efficiency Testing the Same
First Claim
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1. A filter module configured for exhaust application, comprising:
- a housing having a filter aperture on a room side of the housing, an exhaust port on a ceiling side of the housing, and a downstream sampling port configured to allow a technician to sample flow downstream of the filter module and housing from the room side of the housing.
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Abstract
A filter module configured for exhaust application, and a method and apparatus for testing the same are provided. In one embodiment, the filter module includes a downstream sampling port configured to allow a technician to sample flow, downstream of the filter module, from the cleanroom side of a filter module. In another embodiment, a shroud adapted to sealing engage a filter module under test is provided and includes a tube, disposed in the shroud, that couples a port to a downstream sampling port of the filter module.
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Citations
20 Claims
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1. A filter module configured for exhaust application, comprising:
a housing having a filter aperture on a room side of the housing, an exhaust port on a ceiling side of the housing, and a downstream sampling port configured to allow a technician to sample flow downstream of the filter module and housing from the room side of the housing. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An apparatus for testing a filter element mounted in an exhaust filter module, comprising:
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a shroud having a flange for sealing against a cleanroom side face of the filter module and a collar sized to provide a test air flow to the filter element from a blower;
a first port formed through the shroud and configured to sample air in the volume defined between the shroud and the filter element;
a second port is formed through the shroud; and
a flexible conduit coupled to the second port and having sufficient length to extend at least to the flange of the shroud. - View Dependent Claims (9, 10, 11)
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12. A filter module configured for exhaust application, comprising:
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a housing having a filter aperture on a room side of the housing, an exhaust port on a ceiling side of the housing;
a tube extending through the housing between the room side and ceiling side of the housing a knife-edge filter sealing flange extending into the housing;
a first port formed in the flange and having a first end of the tube sealingly coupled thereto;
a port formed in the ceiling side of the housing and having a second end of the tube sealingly coupled thereto.
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13. A method for efficiency testing a filter element mounting in an exhaust configuration, comprising:
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positioning a shroud on a room-side of a filter element;
establishing a flow through the filter element in an exhaust direction;
providing an aerosol challenge to the room-side the filter element;
sampling a concentration of the challenge upstream of the filter element;
sampling a concentration of the challenge upstream of the filter element;
and;
calculating an efficiency of the filter element. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
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Specification