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Multi-protocol multi-client equipment server

  • US 20060277289A1
  • Filed: 01/26/2006
  • Published: 12/07/2006
  • Est. Priority Date: 02/01/2000
  • Status: Active Grant
First Claim
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1. A multi-client multi-protocol equipment server for communicating with a tool, comprising:

  • a plurality of host/client interfaces, at least one of said plurality of host/client interfaces for communicating with a manufacturing execution system;

    a plurality of tool interfaces, at least one of said plurality of tool interfaces for communicating with the tool; and

    an equipment object model of the tool, wherein the manufacturing execution system communicates with the tool based on said equipment object model of the tool.

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