Probe Card Assembly And Kit
1 Assignment
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Accused Products
Abstract
In a probe card assembly, a series of probe elements can be arrayed on a silicon space transformer. The silicon space transformer can be fabricated with an array of primary contacts in a very tight pitch, comparable to the pitch of a semiconductor device. One preferred primary contact is a resilient spring contact. Conductive elements in the space transformer are routed to second contacts at a more relaxed pitch. In one preferred embodiment, the second contacts are suitable for directly attaching a ribbon cable, which in turn can be connected to provide selective connection to each primary contact. The silicon space transformer is mounted in a fixture that provides for resilient connection to a wafer or device to be tested. This fixture can be adjusted to planarize the primary contacts with the plane of a support probe card board.
88 Citations
41 Claims
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1-5. -5. (canceled)
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6. A method of making a probe card assembly for probing a semiconductor wafer, the method comprising:
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providing a probe card having a plurality of first contact terminals;
providing a semiconductor substrate having a plurality of first substrate terminals and second substrate terminals;
providing a plurality of electrical connections connecting selected ones of the plurality of first contact terminals and selected ones of the plurality of first substrate terminals;
providing a plurality of probe elements mounted to the second plurality of substrate terminals; and
providing a movable element that controls an orientation of the substrate with respect to the probe card. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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30. A method of making a probe card assembly comprising:
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providing a silicon semiconductor substrate;
mounting a plurality of resilient probe elements on the substrate;
providing a probe card comprising printed circuit board;
providing electrical connections between the substrate and the probe card; and
resiliently linking the semiconductor substrate to the probe card. - View Dependent Claims (31, 32, 33, 34, 35)
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36. A method for temporarily probing a semiconductor wafer, the method comprising:
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obtaining a semiconductor wafer having a plurality of surface contacts;
obtaining a probe card assembly comprising;
a probe card having a plurality of elongate probes, a probe substrate having a coefficient of thermal expansion substantially identical to that of the wafer, a plurality of resilient electrical connections for connecting the probe card to the wafer via the probe substrate, and a means for resiliently supporting the substrate; and
urging said semiconductor wafer against the plurality of elongate probes that correspond with said plurality of surface contacts. - View Dependent Claims (37, 38, 39, 40, 41)
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Specification