Radiation window and method of manufacture
First Claim
1. A window device configured to transmit radiation, the device comprising:
- a) a support configured to be subject to a substantial vacuum, and having an opening configured to transmit radiation therethrough;
b) a film, mounted directly on the support across the opening, having a material and a thickness selected to transmit soft x-rays, the film having an evacuated side configured to face the substantial vacuum, and an ambient side configured to face away from the substantial vacuum;
c) an adhesive, directly adhering the film to the support;
d) a coating, covering exposed portions of at least one of the evacuated or ambient sides of the film, and covering a portion of the support surrounding the film; and
e) the film, the adhesive and the coating forming a vacuum tight assembly capable of maintaining the substantial vacuum when one side is subject to the substantial vacuum; and
f) the vacuum tight assembly being configured to withstand a temperature greater than approximately 250 degrees Celsius during manufacturing; and
g) the support including a nickel material and the adhesive including a polyimide configured to chemically react with the nickel material of the support to form covalent bonds.
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Accused Products
Abstract
A radiation window device to transmit radiation as part of an x-ray source or detector includes a support to be subject to a substantial vacuum, and an opening configured to transmit radiation. A film is mounted directly on the support across the opening, and has a material and a thickness selected to transmit soft x-rays. An adhesive directly adheres the film to the support. A coating covers exposed portions of at least one of the evacuated or ambient sides of the film, and covers a portion of the support surrounding the film. The support, film and adhesive form a vacuum tight assembly capable of maintaining the substantial vacuum when one side is subject to the substantial vacuum. In addition, the vacuum tight assembly can withstand a temperature of greater than approximately 250 degrees Celsius.
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Citations
31 Claims
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1. A window device configured to transmit radiation, the device comprising:
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a) a support configured to be subject to a substantial vacuum, and having an opening configured to transmit radiation therethrough;
b) a film, mounted directly on the support across the opening, having a material and a thickness selected to transmit soft x-rays, the film having an evacuated side configured to face the substantial vacuum, and an ambient side configured to face away from the substantial vacuum;
c) an adhesive, directly adhering the film to the support;
d) a coating, covering exposed portions of at least one of the evacuated or ambient sides of the film, and covering a portion of the support surrounding the film; and
e) the film, the adhesive and the coating forming a vacuum tight assembly capable of maintaining the substantial vacuum when one side is subject to the substantial vacuum; and
f) the vacuum tight assembly being configured to withstand a temperature greater than approximately 250 degrees Celsius during manufacturing; and
g) the support including a nickel material and the adhesive including a polyimide configured to chemically react with the nickel material of the support to form covalent bonds. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A window device configured to transmit radiation, the device comprising:
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a) a support configured to be subject to a substantial vacuum, and having an opening configured to transmit radiation therethrough;
b) a film, mounted directly on the support across the opening, including a beryllium material, and having a thickness less than approximately 23 micrometers, the film having an evacuated side configured to face the substantial vacuum, and an ambient side configured to face away from the substantial vacuum;
c) an adhesive, adhering the film to the support, including a polymeric material; and
d) a coating, covering exposed portions of at least one of the evacuated or ambient sides of the film, and covering a portion of the support surrounding the film, the coating including a boron-hydrogen composition; and
e) the film, the adhesive and the coating forming a vacuum tight assembly capable of maintaining the substantial vacuum when one side is subject to the substantial vacuum. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A method for making a radiation window device, comprising the steps of:
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a) applying a liquid adhesive to an area of contact between a film and a support, the film being configured to transmit soft x-rays;
b) disposing the film on the support and across an opening in the support;
c) applying a temperature greater than approximately 250 degrees Celsius to the adhesive, the film and the support to cure the adhesive; and
d) coating an exposed portion of the film with an organic material on at least i) an evacuated side of the film configured to face a substantial vacuum, or ii) an ambient side of the film configured to face away from the substantial vacuum. - View Dependent Claims (23, 24, 25, 26)
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27. A method for making a radiation window device, comprising the steps of:
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a) applying a liquid polymide adhesive to an area of contact between a beryllium film and a support;
b) disposing the film on the support and across an opening in the support;
c) applying a temperature greater than approximately 250 degrees Celsius to the adhesive, the film and the support to cure the adhesive; and
d) coating an exposed portion of the film with a boron-hydrogen composition on at least i) an evacuated side of the film configured to face a substantial vacuum, or ii) an ambient side of the film configured to face away from the substantial vacuum. - View Dependent Claims (28, 29, 30)
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31. A window device configured to transmit radiation, the device comprising:
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a) a support configured to be subject to a substantial vacuum, and having an opening configured to transmit radiation therethrough;
b) a film, mounted directly on the support across the opening, having a material and a thickness selected to transmit soft x-rays, the film having an evacuated side configured to face the substantial vacuum, and an ambient side configured to face away from the substantial vacuum;
c) an adhesive, directly adhering the film to the support;
d) a coating, covering exposed portions of at least one of the evacuated or ambient sides of the film, and covering a portion of the support surrounding the film; and
e) the film, the adhesive and the coating forming a vacuum tight assembly capable of maintaining the substantial vacuum when one side is subject to the substantial vacuum; and
f) the material and the thickness of the film being configured to transmit at least 10% of incident radiation of wavelength longer than 18.5 angstroms.
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Specification