Flexible polymer microelectrode with fluid delivery capability and methods for making same

• US 20060282014A1
• Filed: 06/14/2006
• Published: 12/14/2006
• Est. Priority Date: 06/14/2005
• Status: Active Grant

• Current Assignee: Board of Regents of the University of Michigan (University of Michigan)
• Original Assignee: Board of Regents of the University of Michigan (University of Michigan)
• Inventors: Kipke, Daryl R., Pellinen, David S.
• Granted Patent: US 9,014,796 B2
• Time in Patent Office: Days
• US Class Current: 600/573
• CPC Class Codes: A61B 2562/125 characterised by the manufacture of electrodes
• CPC Class Codes: A61B 5/24 Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
• CPC Class Codes: A61B 5/268 containing conductive polymers, e.g. PEDOT:PSS polymers
• CPC Class Codes: A61B 5/4041 Evaluating nerves condition

Abstract

A flexible multi-modal microelectrode is provided that combines multi-channel fluidic and electrical interfaces for biological and other systems. Methods of making and using same are also disclosed.

Claims

1. A microelectrode for receiving or sending electrical signals within the nervous system of an animal, comprising a shaft made of two or more flexible polymer layers, with at least one electrode site disposed on the shaft and at least one channel on the shaft configured for the delivery of fluid to the nervous system.

2. The microelectrode of claim 1, comprising two or more electrode sites.

3. The microelectrode of claim 2, wherein at least one of the electrode sites is a stimulating electrode site.

4. The microelectrode of claim 2, wherein at least one of the electrode sites is a recording electrode site.

5. The microelectrode of claim 1, wherein at least one electrode channel and at least one fluid channel have respective connections compatible with external devices or assemblies.

6. A method for making a microelectrode for receiving or sending electrical signals within the nervous system of an animal and delivering or sampling fluid in an animal, comprising the steps of:

growing an oxide on a silicon carrier;

applying a first polymer layer;

depositing and etching a first metallization layer;

applying a second polymer layer;

etching a polymer layer to create a microchannel;

applying a third polymer layer;

filling the microchannel with a sacrificial resist;

apply a fourth polymer layer;

depositing and etching a second metallization layer;

applying a fifth polymer layer; and

dissolving the oxide layer to release the microelectrode.

7. The method of claim 6, where the polymer is parylene.

8. A method of using a microelectrode for receiving or sending electrical signals within the nervous system of an animal, comprising the steps of:

providing a microelectrode with a shaft made of two or more flexible polymer layers, with at least one electrode site disposed on the shaft and at least one channel on the shaft configured for the delivery of fluid to the nervous system; and

using at least one electrode site and at least one fluid channel individually or in combination to create an interface between the microelectrode and the nervous system.

9. The method in claim 8, in which one or more of the electrode sites is used to record from cells in the nervous system.

10. The method in claim 8, in which one or more of the electrode sites is used to electrically stimulate cells in the nervous system.

11. The method in claim 8, in which one or more of channels are used to deliver fluids to the nervous system.

12. The method in claim 8, in which one or more of channels are used to extract fluids from the nervous system 13. The method in claim 8, in which at least one electrode site is used to record and/or stimulate cells in combination with delivery and/or sampling of fluids from the nervous system