Scanning transmission ion microscope

• US 20060284092A1
• Filed: 06/07/2005
• Published: 12/21/2006
• Est. Priority Date: 06/07/2005
• Status: Active Grant

• Current Assignee: Alis Corp. (Carl-Zeiss-Stiftung)
• Original Assignee: Alis Corp. (Carl-Zeiss-Stiftung)
• Inventors: Ward, Billy W.
• Granted Patent: US 7,321,118 B2
• Time in Patent Office: Days
• US Class Current: 250/311
• CPC Class Codes: G01N 23/04 and forming images of the material
• CPC Class Codes: G01N 23/225 using electron or ion
• CPC Class Codes: H01J 2237/08 Ion sources
• CPC Class Codes: H01J 2237/0807 Gas field ion sources [GFIS]
• CPC Class Codes: H01J 2237/2802 Transmission microscopes
• CPC Class Codes: H01J 37/08 Ion sources; Ion guns
• CPC Class Codes: H01J 37/28 with scanning beams H01J37/268, H01J37/292, H01J37/2955 take precedence

Abstract

Scanning Transmission Ion Microscope. The microscope includes a bright helium ion source to generate an ion beam and a focusing electrostatic optical column to focus the ion beam. A translation stage supports a sample to receive the focused ion beam and a detector responds to ions transmitted through the sample to generate a signal from which properties of the sample may be displayed.

Claims

1. Scanning transmission ion microscope comprising:

a bright helium ion source to generate an ion beam;

a focusing electrostatic optical column to focus the ion beam;

a translation stage supporting a sample to receive the focused ion beam; and

a detector responsive to ions transmitted through the sample to generate a signal from which properties of the sample may be displayed.

2. The microscope of claim 1 further including a cold finger to vary sample temperature.

3. The microscope of claim 1 further including structure to maintain the microscope in a vacuum environment.

4. The microscope of claim 1 further including computer controlled placement of the ion beam on the sample.

5. The microscope of claim 1 further including a charge neutralizing electron beam to neutralize charge on an insulating sample.

6. The microscope of claim 1 wherein the ion beam energy is in the range of 1,000 V to 1,000 keV.