Method for correcting electron beam exposure data
First Claim
Patent Images
1. A method for correcting electron beam exposure data, comprising:
- inputting electron beam exposure data identifiable for each type of pattern of a semiconductor device; and
correcting electron beam exposure data on a second type of pattern without correcting electron beam exposure data on a first type of pattern.
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Abstract
First, electron beam exposure data identifiable for each type of pattern of a semiconductor device is inputted (S601). Then, electron beam exposure data on a first type of pattern is not corrected, while electron beam exposure data on a second type of pattern is corrected (S603). The first type of pattern is, for example, a dummy pattern having no influence on the function of the semiconductor device. The second type of pattern is for example, a normal pattern having an influence on the function of the semiconductor device.
18 Citations
20 Claims
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1. A method for correcting electron beam exposure data, comprising:
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inputting electron beam exposure data identifiable for each type of pattern of a semiconductor device; and
correcting electron beam exposure data on a second type of pattern without correcting electron beam exposure data on a first type of pattern. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. An electron beam exposure data correcting device, comprising:
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an input unit inputting electron beam exposure data identifiable for each type of pattern of a semiconductor device; and
a correction unit correcting electron beam exposure data on a second type of pattern without correcting electron beam exposure data on a first type of pattern.
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20. A program product for causing a computer to execute:
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inputting electron beam exposure data identifiable for each type of pattern of a semiconductor device; and
correcting electron beam exposure data on a second type of pattern without correcting electron beam exposure data on a first type of pattern.
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Specification