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STAGE APPARATUS AND IMAGE MOVEMENT CORRECTION APPARATUS FOR CAMERA USING STAGE APPARATUS

  • US 20060284495A1
  • Filed: 06/12/2006
  • Published: 12/21/2006
  • Est. Priority Date: 06/15/2005
  • Status: Active Grant
First Claim
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1. A stage apparatus comprising:

  • a stationary support plate;

    a stage member provided on the stationary support plate so as to move on a reference plane parallel with the stationary support plate;

    a plurality of Y-direction magnetic flux generating devices secured to one of said stationary support plate and said stage member; and

    a plurality of Y-direction moving coils secured to the other of said stationary support plate and said stage member, said Y-direction moving coils receiving magnetic flux from said Y-direction magnetic flux generating devices so as to generate a driving force in a specific Y-direction parallel with said reference plane between said Y-direction magnetic flux generating devices and said Y-direction moving coils, wherein one of said Y-direction moving coils and said Y-direction magnetic flux generating devices at least partly overlap each other in an X-direction, which is parallel with said reference plane and perpendicular to said Y-direction, and do not overlap in said Y-direction.

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