Actuator having vertical comb electrode structure
First Claim
1. An actuator having a vertical comb electrode structure, the actuator comprising:
- a stage seesawing in a first direction;
a support unit supporting the seesawing motion of the stage; and
a stage driving unit including vertical driving comb electrodes extending outward from opposite sides of the stage in the first direction, and vertical fixed comb electrodes disposed on a substrate to alternate with the driving comb electrodes, wherein the fixed comb electrodes include first fixed comb electrodes lower than the driving comb electrodes, insulation layers formed on the first fixed comb electrodes, and second fixed comb electrodes formed on the insulation layers to be higher than bottom surfaces of the driving comb electrodes.
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Abstract
An actuator having a vertical comb electrode structure is provided. The actuator includes: a stage seesawing in a first direction; a support unit supporting the seesawing motion of the stage; and a stage driving unit including vertical driving comb electrodes extending outward from opposite sides of the stage in the first direction, and vertical fixed comb electrodes disposed on a substrate to alternate with the driving comb electrodes, wherein the fixed comb electrodes include first fixed comb electrodes lower than the driving comb electrodes, insulation layers formed on the first fixed comb electrodes, and second fixed comb electrodes formed on the insulation layers to be higher than bottom surfaces of the driving comb electrodes.
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Citations
26 Claims
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1. An actuator having a vertical comb electrode structure, the actuator comprising:
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a stage seesawing in a first direction;
a support unit supporting the seesawing motion of the stage; and
a stage driving unit including vertical driving comb electrodes extending outward from opposite sides of the stage in the first direction, and vertical fixed comb electrodes disposed on a substrate to alternate with the driving comb electrodes, wherein the fixed comb electrodes include first fixed comb electrodes lower than the driving comb electrodes, insulation layers formed on the first fixed comb electrodes, and second fixed comb electrodes formed on the insulation layers to be higher than bottom surfaces of the driving comb electrodes. - View Dependent Claims (2, 3, 4, 5)
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6. An actuator having a vertical comb electrode structure, the actuator comprising:
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a stage suspended above a substrate and seesawing in a first direction;
a support unit supporting the seesawing motion of the stage; and
a stage driving unit including vertical driving comb electrodes extending outward from opposite sides of the stage in the first direction, and vertical fixed comb electrodes formed on the substrate to alternate with the driving comb electrodes, wherein the driving comb electrodes include first driving comb electrodes higher than the fixed comb electrodes, insulation layers formed on bottom surfaces of the first driving comb electrodes, and second driving comb electrodes formed on the insulation layers to be lower than top surfaces of the fixed comb electrodes. - View Dependent Claims (7, 8, 9, 10)
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11. An actuator having a vertical comb electrode structure, the actuator comprising:
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a stage seesawing in a first direction;
a first support unit supporting the stage;
a stage driving unit including first driving comb electrodes extending outward from opposite sides of the stage in the first direction, and first fixed comb electrodes formed on the first support unit facing the first driving comb electrodes to alternate with the first driving comb electrodes;
a second support unit supporting the first support unit so that the first support unit can seesaw in a second direction perpendicular to the first direction; and
a first support unit driving unit including second driving comb electrodes formed at the first support unit, and second fixed comb electrodes corresponding to the second driving comb electrodes, wherein the second fixed comb electrodes include third fixed comb electrodes lower than the second driving comb electrodes, insulation layers formed on the third fixed comb electrodes, and fourth fixed comb electrodes formed on the insulation layers to be higher than bottom surfaces of the second driving comb electrodes. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18)
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19. An actuator having a vertical comb electrode structure, the actuator comprising:
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a stage seesawing in a first direction;
a first support unit supporting the stage;
a stage driving unit including first driving comb electrodes extending outward extending from opposite sides of the stage in the first direction, and first fixed comb electrodes formed on the first support unit facing the first driving comb electrodes to alternate with the first driving comb electrodes;
a second support unit supporting the first support unit so that the first support unit can seesaw in a second direction perpendicular to the first direction; and
a first support unit driving unit including second driving comb electrodes formed at the first support unit, and second fixed comb electrodes corresponding to the second driving comb electrodes, wherein the second driving comb electrodes include third driving comb electrodes higher than the second fixed comb electrodes, insulation layers formed on bottom surfaces of the third driving comb electrodes, and fourth driving comb electrodes formed on the insulation layers to be lower than top surfaces of the second fixed comb electrodes. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26)
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Specification