Method and structure of patterning landing pad structures for spatial light modulators
First Claim
1. A spatial light modulator comprising:
- a first substrate;
a standoff structure coupled to the first substrate;
a mirror structure coupled to the standoff structure, the mirror structure comprising;
a mirror body comprising at least one edge region and at least one end region;
a reflective layer coupled to the mirror body; and
a flexible member coplanar with the mirror body, wherein the mirror structure rotates about the flexible member to an activated position, the at least one edge region of the mirror body making contact with the standoff structure in the activated position while maintaining the at least one end region free from contact with the first substrate.
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Abstract
A spatial light modulator. The spatial light modulator includes a first substrate and a standoff structure coupled to the first substrate. The spatial light modulator also includes a mirror structure coupled to the standoff structure. The mirror structure includes a mirror body comprising at least one edge region and at least one end region, a reflective layer coupled to the mirror body, and a flexible member coplanar with the mirror body. According to an embodiment of the present invention, the mirror structure rotates about the flexible member to an activated position. In the activated position, the at least one edge region of the mirror body makes contact with the standoff structure while maintaining the at least one end region free from contact with the first substrate.
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Citations
20 Claims
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1. A spatial light modulator comprising:
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a first substrate;
a standoff structure coupled to the first substrate;
a mirror structure coupled to the standoff structure, the mirror structure comprising;
a mirror body comprising at least one edge region and at least one end region;
a reflective layer coupled to the mirror body; and
a flexible member coplanar with the mirror body, wherein the mirror structure rotates about the flexible member to an activated position, the at least one edge region of the mirror body making contact with the standoff structure in the activated position while maintaining the at least one end region free from contact with the first substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method of fabricating a spatial light modulator, the method comprising:
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providing a first substrate, the first substrate comprising a plurality of electrodes and a first bonding region;
forming a first layer coupled to the first bonding region, the first layer extending from the first bonding region to a first height;
patterning the first layer to form a contact structure;
providing a second substrate comprising a device layer;
patterning the device layer to form a spacer structure and a mirror layer, the spacer structure extending from the mirror layer to a second height;
joining the contact structure of the first substrate and the spacer structure of the second substrate; and
removing a portion of the mirror layer to form a flexible member and a mirror plate, the mirror plate comprising at least one edge region and at least one corner region, wherein the at least one edge region makes contact with the contact structure in an activated position while maintaining the at least one end region free from contact with the first substrate. - View Dependent Claims (15, 16, 17, 18)
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19. An array of spatial light modulators, the array comprising:
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an electrode substrate;
a standoff structure with integrated contact pads coupled to the electrode substrate, the standoff structure including a plurality of annular recesses;
a first set of electrodes disposed within a first annular recess of the standoff structure;
a first micro-mirror associated with the first set of electrodes, coupled to the standoff structure, and adapted to rotate about a first hinge to an activated position, the first micro-mirror comprising at least one first edge region and at least one first end region, wherein the at least one first edge region makes contact with at least a first contact pad in the activated position while maintaining the at least one first end region free from contact with the electrode substrate;
a second set of electrodes disposed within a second annular recess of the standoff structure; and
a second micro-mirror associated with the second set of electrodes, coupled to the standoff structure, and adapted to rotate about a second hinge to an activated position, the second micro-mirror comprising at least one second edge region and at least one second end region, wherein the at least one second edge region makes contact with at least a second contact pad in the activated position while maintaining the at least one second end region free from contact with the electrode substrate. - View Dependent Claims (20)
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Specification