Electrochemical apparatus with barrier layer protected substrate

• US 20060286448A1
• Filed: 08/23/2005
• Published: 12/21/2006
• Est. Priority Date: 08/09/2002
• Status: Active Grant

• Current Assignee: Sapurast Research LLC
• Original Assignee: Infinite Power Solutions, Inc. (Apple Inc.)
• Inventors: Neudecker, Bernd J., Snyder, Shawn W.
• Granted Patent: US 8,021,778 B2
• Time in Patent Office: Days
• US Class Current: 429/176
• CPC Class Codes: H01M 10/0436 Small-sized flat cells or batteries for portable equipment
• CPC Class Codes: H01M 10/052 Li-accumulators
• CPC Class Codes: H01M 10/0585 of accumulators having only flat construction elements, i.e. flat positive electrodes, flat negative electrodes and flat separators
• CPC Class Codes: H01M 2004/021 Physical characteristics, e.g. porosity, surface area
• CPC Class Codes: H01M 4/02 Electrodes composed of, or comprising, active material
• CPC Class Codes: H01M 4/0421 involving vapour deposition
• CPC Class Codes: H01M 4/139 Processes of manufacture
• CPC Class Codes: H01M 4/525 of mixed oxides or hydroxides containing iron, cobalt or nickel for inserting or intercalating light metals, e.g. LiNiO2, LiCoO2 or LiCoOxFy
• CPC Class Codes: H01M 50/124 having a layered structure
• CPC Class Codes: H01M 50/126 comprising three or more layers
• CPC Class Codes: H01M 50/133 Thickness
• CPC Class Codes: H01M 50/141 for protecting against humidity
• CPC Class Codes: H01M 50/24 adapted for protecting batteries from their environment, e.g. from corrosion thermal insulation H01M10/658
• CPC Class Codes: H01M 6/40 Printed batteries , e.g. thin film batteries
• CPC Class Codes: Y02E 60/10 Energy storage using batteries
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product
• CPC Class Codes: Y10T 29/49115 including coating or impregnating

Abstract

The present invention relates to apparatus, compositions and methods of fabricating high performance thin-film batteries on metallic substrates, polymeric substrates, or doped or undoped silicon substrates by fabricating an appropriate barrier layer composed, for example, of barrier sublayers between the substrate and the battery part of the present invention thereby separating these two parts chemically during the entire battery fabrication process as well as during any operation and storage of the electrochemical apparatus during its entire lifetime. In a preferred embodiment of the present invention thin-film batteries fabricated onto a thin, flexible stainless steel foil substrate using an appropriate barrier layer that is composed of barrier sublayers have uncompromised electrochemical performance compared to thin-film batteries fabricated onto ceramic substrates when using a 700° C. post-deposition anneal process for a LiCoO₂ positive cathode.

Claims

1. An electrochemical apparatus comprising:

a) a substrate, selected from the group of a metallic, a polymeric, or a doped or undoped silicon material, with a first side;

b) a first electrochemically active cell on said first side having a negative part and a positive part, said parts further comprising one or more terminals;

c) a first barrier layer on said first side which chemically separates said first electrochemically active cell from said substrate; and

d) wherein said first barrier layer further comprises a plurality of sublayers.

2. The electrochemical apparatus of claim 1 further comprising a plurality of electrochemically active cells provided on said first side of said substrate.

3. The electrochemical apparatus of claim 1 wherein said first barrier layer comprises a chemically inert material with respect to said first electrochemically active cell and said substrate;

and is adapted to be diffusion blocking relative to said first electrochemically active cell, and said substrate, during the fabrication of said first electrochemically active cell onto said substrate, and during operation and storage conditions of said electrochemical apparatus.

4. The electrochemical apparatus of claim 1 wherein said sublayers are selected from the group of electrically conducting, electrically insulating, or electrically semi-conducting materials wherein:

a) said positive part of said first electrochemically active cell is not in electrical contact with said negative part of said first electrochemically active cell;

b) said positive part of said first electrochemically active cell comprises at least a positive cathode, a cathode current collector, and a positive terminal; and

c) said negative part of said first electrochemically active cell comprises at least a negative anode, an anode current collector, and a negative terminal.

5. The electrochemical apparatus of claim 4 wherein said cathode current collector comprises said positive terminal.

6. The electrochemical apparatus of claim 4 wherein said anode current collector comprises said negative terminal.

7. The electrochemical apparatus of claim 4 wherein said anode current collector comprises said anode.

8. The electrochemical apparatus of claim 4 wherein said anode current collector comprises said anode current collector, said anode, and said negative terminal.

9. The electrochemical apparatus of claim 1 wherein said sublayers each comprise the same shape and area size.

10. The electrochemical apparatus of claim 1 wherein at least one of said sublayers comprises a different shape and area size from another of said plurality of sublayers.

11. The electrochemical apparatus of claim 1 wherein said first barrier layer only partially covers said substrate such that at least said positive part of said first electrochemically active cell is chemically separated from said substrate.

12. The electrochemical apparatus of claim 1 wherein said first barrier layer only partially covers said substrate such that at least said negative part of said first electrochemically active cell is chemically separated from said substrate.

13. The electrochemical apparatus of claim 1 wherein said first barrier layer comprises a thickness ranging from 0.01 μ

m to 1 mm.

14. The electrochemical apparatus of claim 1 wherein said first barrier layer comprises a thickness ranging from 0.1 μ

m to 100 μ

m.

15. The electrochemical apparatus of claim 1 wherein said first barrier layer comprises a thickness ranging from 0.5 μ

m to 5 μ

m.

16. The electrochemical apparatus of claim 1 wherein said substrate comprises a thickness within a range of 0.1 μ

m to 1 cm.

17. The electrochemical apparatus of claim 1 wherein said substrate comprises a thickness within a range of 1 μ

m to 1 mm.

18. The electrochemical apparatus of claim 1 wherein said substrate comprises a thickness within a range of 10 μ

m to 100 μ

m.

19. The electrochemical apparatus of claim 1 wherein said sublayers comprise a chemical compound selected:

a) from the group of metals, semi-metals, alloys, borides, carbides, diamond, diamond-like carbon, silicides, nitrides, phosphides, oxides, fluorides, chlorides, bromides, iodides;

b) from the group of any multinary compounds composed of borides, carbides, silicides, nitrides, phosphides, oxides, fluorides, chlorides, bromides, and iodides;

or

c) from the group of high-temperature stable organic polymers and high-temperature stable silicones.

20. The electrochemical apparatus of claim 1 wherein at least one of said sublayers comprise a single phase of crystalline, nano-crystalline, amorphous, or glassy material or poly phase mixture or composite thereof.

21. The electrochemical apparatus of claim 1 wherein at least one of said sublayers comprise a single phase of amorphous or glassy material.

22. The electrochemical apparatus of claim 1 wherein said first electrochemically active cell comprises a battery selected from the group of lithium metal anode batteries, lithium-ion anode batteries, and lithium free anode batteries.

23. The electrochemical apparatus of claim 22 wherein said first electrochemically active cell comprises a positive thin-film cathode deposited by vapor deposition, and wherein a thickness of said positive thin-film cathode is less than 200 μ

m.

24. The electrochemical apparatus of claim 22 wherein said first electrochemically active cell comprises a positive thin-film cathode deposited by non-vacuum deposition, and wherein a thickness of said positive thin-film cathode is less than 200 μ

m.

25. The electrochemical apparatus of claim 23 wherein said positive thin-film cathode comprises single crystallites having a size of at least 100 Å

.

26. The electrochemical apparatus of claim 24 wherein said positive thin-film cathode comprises single crystallites having a size of at least 100 Å

.

27. The electrochemical apparatus of claim 1 wherein said first electrochemically active cell comprises a thin-film solid-state electrolyte having a thickness of less than 100 μ

m.

28. The electrochemical apparatus of claim 1 wherein said first electrochemically active cell comprises a thin-film negative anode selected from the group of lithium metal, lithium-ion anode, or a metal that does not form inter-metallic compounds with lithium, and wherein the thickness of said thin-film negative anode is less than 200 μ

m.

29. The electrochemical apparatus of claim 1 wherein said first electrochemically active cell further comprises a protective encapsulation and wherein said protective encapsulation is adapted to protect said first electrochemically active cell against at least mechanical and chemical factors from the ambient environment.

30. The electrochemical apparatus of claim 1 further comprising a protective encasing and wherein said protective encasing is adapted to protect said electrochemical apparatus against at least mechanical and chemical factors from the ambient environment.

31. The electrochemical apparatus of claim 29 wherein said encapsulation has at least one opening adapted to allow direct electrical contact to at least one terminal of said first electrochemically active cell.

32. The electrochemical apparatus of claim 30 wherein said protective encasing has at least one opening adapted to allow direct electrical contact to at least one terminal of said first electrochemical apparatus.

33. The electrochemical apparatus of claim 31 wherein said electrochemically active cell further comprises an electrolyte and wherein said one or more terminals are separated from said electrolyte by a moisture protection layer.

34. The electrochemical apparatus of claim 32 wherein said electrochemically active cell further comprises an electrolyte and wherein said one or more terminals are separated from said electrolyte by a moisture protection layer.

35. The electrochemical apparatus of claim 33 wherein said moisture protection layer comprises a material having moisture blocking properties, and is selected:

a) from the group of metals, semi-metals, alloys, borides, carbides, diamond, diamond-like carbon, silicides, nitrides, phosphides, oxides, fluorides, chlorides, bromides, iodides;

b) from the group of any multinary compounds composed of borides, carbides, silicides, nitrides, phosphides, oxides, fluorides, chlorides, bromides, and iodides;

or

c) from the group of high-temperature stable organic polymers and high-temperature stable silicones.

36. The electrochemical apparatus of claim 33 wherein said moisture protection layer comprises a single phase of crystalline, nano-crystalline, amorphous, or glassy material or poly phase mixture or composite thereof.

37. The electrochemical apparatus of claim 34 wherein said moisture protection layer comprises a material having moisture blocking properties, and is selected:

a) from the group of metals, semi-metals, alloys, borides, carbides, diamond, diamond-like carbon, suicides, nitrides, phosphides, oxides, fluorides, chlorides, bromides, iodides;

b) from the group of any multinary compounds composed of borides, carbides, suicides, nitrides, phosphides, oxides, fluorides, chlorides, bromides, and iodides;

or

c) from the group of high-temperature stable organic polymers and high-temperature stable silicones.

38. The electrochemical apparatus of claim 34 wherein said moisture protection layer comprises a single phase of crystalline, nano-crystalline, amorphous, or glassy material or poly phase mixture or composite thereof.

39. The electrochemical apparatus of claim 1 further comprising a second layer located on a second side of said substrate.

40. The electrochemical apparatus of claim 39 wherein said second layer comprises a chemical compound selected:

a) from the group of metals, semi-metals, alloys, borides, carbides, diamond, diamond-like carbon, silicides, nitrides, phosphides, oxides, fluorides, chlorides, bromides, iodides;

b) from the group of any multinary compounds composed of borides, carbides, silicides, nitrides, phosphides, oxides, fluorides, chlorides, bromides, and iodides;

or

c) from the group of high-temperature stable organic polymers and high-temperature stable silicones.

41. An electrochemical apparatus comprising:

a) a metallic, a polymeric, or a doped or undoped silicon substrate having a first side and a second side;

b) a first electrochemically active cell on said first side further comprising a positive part, a negative part, said parts further comprising one or more terminals;

c) a first barrier layer on said first side which chemically separates said first electrochemically active cell from said metallic, polymeric, or doped or undoped silicon substrate;

d) a second electrochemically active cell on said second side further comprising a positive part, a negative part, said parts further comprising one or more terminals;

e) a second barrier layer on said second side which chemically separates said second electrochemically active cell from said substrate;

f) wherein said first barrier layer comprises a plurality of sublayers; and

g) wherein said second barrier layer comprises a plurality of sublayers.

42. The electrochemical apparatus of claim 41 further comprising a plurality of electrochemically active cells provided on said first side of said substrate.

43. The electrochemical apparatus of claim 41 further comprising a plurality of electrochemically active cells provided on said second side of said substrate.

44. The electrochemical apparatus of claim 41 wherein said barrier layers on both sides of said substrate are adapted to chemically separate said electrochemically active cells from said substrate and further comprising:

(a) said first barrier layer comprising chemically inert material relative to said first electrochemically active cell on said first side of said substrate and relative to said substrate;

(b) said second barrier layer comprising chemically inert material relative to said second electrochemically active cell on said second side of said substrate and relative to said substrate;

(c) said first barrier layer further comprising diffusion blocking properties relative to chemical elements within said first electrochemically active cell on said first side of said substrate; and

(d) said second barrier layer further comprising diffusion blocking properties relative to chemical elements within said second electrochemically active cell on said second side of said substrate.

45. The electrochemical apparatus of claim 41 wherein:

a) said sublayers are selected from the group of electrically conducting, electrically insulating, or electrically semi-conducting materials;

b) said positive parts of said electrochemically active cells are not in electrical contact with said negative parts of said electrochemically active cells on both sides of said substrate;

c) said positive part of said electrochemically active cells comprises at least a positive cathode, a cathode current collector, and a positive terminal; and

d) said negative part of said electrochemically active cells comprises at least a negative anode, an anode current collector, and a negative terminal.

46. The electrochemical apparatus of claim 45 wherein said cathode current collector comprises said positive terminal.

47. The electrochemical apparatus of claim 45 wherein said anode current collector comprises said negative terminal.

48. The electrochemical apparatus of claim 45 wherein said anode current collector comprises said anode.

49. The electrochemical apparatus of claim 45 wherein said anode current collector comprises said anode current collector, said anode, and said negative terminal.

50. The electrochemical apparatus of claim 41 wherein said sublayers each comprise the same shape and area size.

51. The electrochemical apparatus of claim 41 wherein at least one of said sublayers comprise a different shape and area size from another of said plurality of sublayers.

52. The electrochemical apparatus of claim 41 wherein at least one of said barrier layers only partially covers said substrate wherein at least said positive part of said electrochemically active cells is chemically separated from said substrate.

53. The electrochemical apparatus of claim 41 wherein at least one of said barrier layers only partially covers said substrate wherein at least said negative part of said electrochemically active cells is chemically separated from said substrate.

54. The electrochemical apparatus of claim 41 wherein said barrier layers on both sides of said substrate comprise a thickness in a range from 0.01 μ

m to 1 mm.

55. The electrochemical apparatus of claim 41 wherein said barrier layers on both sides of said substrate comprise a thickness in a range from 0.1 μ

m to 100 μ

m.

56. The electrochemical apparatus of claim 41 wherein said barrier layers on both sides of said substrate comprise a thickness in a range from 0.5 μ

m to 5 μ

m.

57. The electrochemical apparatus of claim 41 wherein said substrate comprises a thickness within a range of 0.1 μ

m to 1 cm.

58. The electrochemical apparatus of claim 41 wherein said substrate comprises a thickness within a range of 1 μ

m to 1 mm.

59. The electrochemical apparatus of claim 41 wherein said substrate comprises a thickness within a range of 10 μ

m to 100 μ

m.

60. The electrochemical apparatus of claim 41 wherein at least one of said sublayers comprise a chemical compound selected:

a) from the group of metals, semi-metals, alloys, borides, carbides, diamond, diamond-like carbon, suicides, nitrides, phosphides, oxides, fluorides, chlorides, bromides, iodides;

b) from the group of any multinary compounds composed of borides, carbides, suicides, nitrides, phosphides, oxides, fluorides, chlorides, bromides, and iodides;

or

c) from the group of high-temperature stable organic polymers and high-temperature stable silicones.

61. The electrochemical apparatus of claim 41 wherein at least one of said sublayers comprise a single phase of crystalline, nano-crystalline, amorphous, or glassy material or any poly phase mixture or composite thereof.

62. The electrochemical apparatus of claim 41 wherein at least one of said sublayers comprise a single phase of amorphous or glassy material.

63. The electrochemical apparatus of claim 41 wherein said electrochemically active cells on both sides of said substrate comprise batteries selected from the group of lithium metal anode batteries, lithium-ion anode batteries, and lithium free anode batteries.

64. The electrochemical apparatus of claim 41 wherein said electrochemically active cells comprise positive thin-film cathodes deposited by vapor deposition or non-vacuum deposition, and wherein said positive thin-film cathodes comprise a thickness less than 200 μ

m.

65. The electrochemical apparatus of claim 64 wherein said positive thin-film cathodes comprise single crystallites having a size of at least 100 Å

.

66. The electrochemical apparatus of claim 41 wherein said electrochemically active cells further comprise a thin-film solid-state electrolyte having a thickness of less than 100 μ

m.

67. The electrochemical apparatus of claim 41 wherein said electrochemically active cells comprise thin-film negative anodes selected from the group of lithium metal, lithium-ion anode, or a metal that does not form inter-metallic compounds with lithium, and said thin-film negative anodes comprise a thickness less than 200 μ

m.

68. The electrochemical cells of claim 41 wherein each of said electrochemically active cells or said electrochemical apparatus comprises a protective encapsulation or protective encasing, wherein said encapsulation or encasing is adapted to protect said electrochemically active cells or said electrochemical apparatus, against at least mechanical and chemical factors in an ambient environment.

69. The electrochemical apparatus of claim 68 wherein said encapsulation or said encasing has at least one opening adapted to allow direct electrical contact to at least one terminal of each of said electrochemically active cells.

70. The electrochemical apparatus of claim 69 wherein said electrochemically active cells further comprise electrolyte and wherein said terminals are externally accessible by an opening in said encapsulation and are separated from said electrolyte by a moisture protection layer.

71. The electrochemical apparatus of claim 70 wherein said moisture protection layer comprises a material with moisture blocking properties and is selected:

a) from the group of metals, semi-metals, alloys, borides, carbides, diamond, diamond-like carbon, silicides, nitrides, phosphides, oxides, fluorides, chlorides, bromides, iodides;

b) from the group of any multinary compounds composed of borides, carbides, silicides, nitrides, phosphides, oxides, fluorides, chlorides, bromides, and iodides;

or

c) from the group of high-temperature stable organic polymers and high-temperature stable silicones.

72. The electrochemical apparatus of claim 70 wherein said moisture protection layer comprises a single phase of crystalline, nano-crystalline, amorphous, or glassy material or any poly phase mixture or composite thereof.

73. A method of fabricating an electrochemical apparatus comprising:

(a) providing a metallic, a polymeric, or a silicon substrate with a first side;

(b) depositing a first barrier layer on said first side;

(c) fabricating a first electrochemically active cell comprising a positive part and a negative part, said parts further comprising one or more terminals, said cell located on said first side on top of said first barrier layer, said barrier layer chemically separating said first electrochemically active cell from said substrate; and

(d) fabricating said first barrier layer from a plurality of chemically different sublayers.

74. The method of claim 73 further comprising providing a plurality of electrochemically active cells on said first side of said substrate.

75. The method of claim 73 further comprising:

a) selecting said sublayers from the group of electrically conducting, electrically insulating, or electrically semi-conducting materials;

b) prohibiting said positive part of said first electrochemically active cell from electrically contacting said negative part of said first electrochemically active cell;

c) providing a positive cathode, a cathode current collector, and a positive terminal on said positive part of said first electrochemically active cell; and

d) providing a negative anode, an anode current collector, and a negative terminal on said negative part of said first electrochemically active cell.

76. The method of claim 75 further comprising providing said cathode current collector as said positive terminal.

77. The method of claim 75 further comprising providing said anode current collector as said negative terminal.

78. The method of claim 75 further comprising providing said anode current collector as said anode.

79. The method of claim 75 further comprising providing said anode current collector as said anode current collector, said anode, and said negative terminal.

80. The method of claim 73 further comprising providing said sublayers with each sublayer comprising a same shape and area size.

81. The method of claim 73 further comprising providing at least one of said sublayers comprising a different shape and area size from another of said plurality of sublayers.

82. The method of claim 73 further comprising covering said substrate only partially with said first barrier layer such that at least said positive part of said first electrochemically active cell is chemically separated from said substrate.

83. The method of claim 73 further comprising providing said first barrier layer only partially covering said substrate such that at least the negative part of said first electrochemically active cell is chemically separated from said substrate.

84. The method of claim 73 further comprising fabricating said sublayers from a chemical compound selected:

a) from the group of metals, semi-metals, alloys, borides, carbides, diamond, diamond-like carbon, silicides, nitrides, phosphides, oxides, fluorides, chlorides, bromides, iodides;

b) from the group of any multinary compounds composed of borides, carbides, silicides, nitrides, phosphides, oxides, fluorides, chlorides, bromides, and iodides, or from the group of high-temperature stable organic polymers and high-temperature stable silicones.

85. The method of claim 73 further comprising fabricating said sublayers from a single phase of crystalline, nano-crystalline, amorphous, or glassy material or any poly-phase mixture or composite thereof.

86. The method of claim 73 further comprising fabricating said sublayers from a single phase of amorphous or glassy material.

87. The method of claim 73 further comprising fabricating a positive cathode on said first electrochemically cell by an in-situ or ex-situ temperature process between 100°

C. and up to the melting point of said substrate so that said positive cathode comprises crystallites having a size of at least 100 Å

.

88. The method of claim 73 further comprising protecting said first electrochemically active cell or said electrochemical apparatus, respectively, against at least mechanical and chemical factors from the ambient environment by providing a protective encapsulation or a protective encasing.

89. The method of claim 88 further comprising fabricating said encapsulation or said encasing with at least one opening allowing direct electrical contact to said one or more terminals of said first electrochemically active cell.

90. The method of claim 89 further comprising providing an electrolyte in one said electrochemically active cell and separating said electrolyte from said one or more terminals by a moisture protection layer.

91. The method of claim 90 further comprising fabricating said moisture protection layer from materials that possess moisture blocking properties and selecting a chemical compound for said protection layer:

a) from the group of metals, semi-metals, alloys, borides, carbides, diamond, diamond-like carbon, silicides, nitrides, phosphides, oxides, fluorides, chlorides, bromides, iodides;

b) from the group of any multinary compounds composed of borides, carbides, suicides, nitrides, phosphides, oxides, fluorides, chlorides, bromides, and iodides;

or

c) from the group of high-temperature stable organic polymers and high-temperature stable silicones.

92. The method of claim 90 further comprising fabricating said moisture protection layer from materials that comprise a single phase of crystalline, nano-crystalline, amorphous, or glassy material or any poly phase mixture or composite thereof.

93. The method of claim 73 further comprising depositing a second layer onto a second side of said substrate for the purpose of chemical protecting said substrate and said first electrochemically active cell on said first side of the substrate from the ambient environment prior to the fabrication of said first electrochemically active cell;

and chemically protecting said first electrochemically active cell by blocking the diffusion of contaminants from the ambient environment.

94. The method of claim 93 further comprising fabricating said second layer from a chemical compound selected:

a) from the group of metals, semi-metals, alloys, borides, carbides, diamond, diamond-like carbon, silicides, nitrides, phosphides, oxides, fluorides, chlorides, bromides, iodides;

b) from the group of any multinary compounds composed of borides, carbides, silicides, nitrides, phosphides, oxides, fluorides, chlorides, bromides, and iodides;

or

c) from the group of high-temperature stable organic polymers and high-temperature stable silicones.

95. The method of claim 93 further comprising thermally relieving said first barrier layer and said second layer by an in-situ or ex-situ temperature process between 100°

C. and up to the melting point of said substrate and wherein said ex-situ temperature process further comprises applying said temperature process after deposition of said first barrier layer and said second layer.

96. The method of fabricating an electrochemical apparatus comprising the following steps:

(a) providing a metallic, a polymeric, or a doped or undoped silicon substrate with a first and a second side;

(b) depositing a first barrier layer on said first side;

(c) depositing a second barrier layer on said second side;

(d) fabricating a first electrochemically active cell on said first side on top of said first barrier layer, which chemically separates said first electrochemically active cell from said substrate;

(e) fabricating a second electrochemically active cell on said second side on top of said second barrier layer, which chemically separates said second electrochemically active cell from said substrate;

(f) composing said first barrier layer of a plurality of chemically different sublayers; and

(g) composing said second barrier layer of a plurality of chemically different sublayers.

97. The method of claim 96 further comprising providing a plurality of said electrochemically active cells on said first side of said substrate.

98. The method of claim 96 further comprising providing a plurality of said electrochemically active cells on said second side of said substrate.

99. The method of claim 96 further comprising:

a) selecting said sublayers from the group of electrically conducting, electrically insulating, or electrically semi-conducting materials;

b) avoiding electrical contact between a positive part of said electrochemically active cells with a negative part of said electrochemically active cells on both sides of said substrate;

c) providing on said positive part of said electrochemically active cells a positive cathode, a cathode current collector, and a positive terminal;

d) providing on said negative part of said electrochemically active cells a negative anode, an anode current collector, and a negative terminal.

100. The method of claim 99 further comprising providing said cathode current collector as said positive terminal.

101. The method of claim 99 further comprising providing said anode current collector as said negative terminal.

102. The method of claim 99 further comprising providing said anode current collector as said anode.

103. The method of claim 99 further comprising providing said anode current collector as said anode current collector, said anode, and said negative terminal.

104. The method of claim 96 further comprising providing said sublayers comprising a same shape and area size.

105. The method of claim 96 further comprising providing at least one of said sublayers comprising a different shape and area size than another of said plurality of sublayers.

106. The method of claim 96 further comprising only partially covering said substrate with at least one of said barrier layers wherein at least the positive part of said electrochemically active cells is chemically separated from said substrate.

107. The method of claim 96 further comprising only partially covering said substrate with at least one of said barrier layers wherein at least the negative part of said electrochemically active cells is chemically separated from said substrate.

108. The method of claim 96 further comprising fabricating said sublayers on both sides of said substrate from a chemical compound selected:

a) from the group of metals, semi-metals, alloys, borides, carbides, diamond, diamond-like carbon, silicides, nitrides, phosphides, oxides, fluorides, chlorides, bromides, iodides;

b) from the group of any multinary compounds composed of borides, carbides, suicides, nitrides, phosphides, oxides, fluorides, chlorides, bromides, and iodides;

or

c) from the group of high-temperature stable organic polymers and high-temperature stable silicones.

109. The method of claim 96 further comprising fabricating said sublayers from a single phase of crystalline, nano-crystalline, amorphous, or glassy material or any poly-phase mixture or composite thereof.

110. The method of claim 96 further comprising fabricating said sublayers from a single phase of amorphous or glassy material.

111. The method of claim 96 further comprising thermally relieving said first barrier layer and said second barrier layer by an in-situ or ex-situ temperature process between 100°

C. and up to the melting point of substrate, and wherein said ex-situ temperature process is applied after said deposition of said first barrier layer and said second barrier layer.

112. The method of claim 96 further comprising fabricating said positive cathodes of said electrochemical cells by an in-situ or ex-situ temperature process between 100°

C. and up to the melting point of said substrate to provide positive cathodes comprising crystallites having a size of at least 100 Å

.

113. The method of claim 96 further comprising fabricating each of said electrochemically active cells or said electrochemical apparatus with a protective encapsulation or protective encasing, protecting each of said electrochemically active cells or said electrochemical apparatus against at least mechanical and chemical factors from an ambient environment.

114. The method of claim 113 further comprising fabricating said encapsulation or said encasing with at least one opening per said encapsulation or said encasing allowing direct electrical contact to at least one of the terminals of each of said electrochemically active cells.

115. The method of claim 114 further comprising providing an electrolyte in said electrochemically active cells and separating said electrolyte from said terminals by a moisture protection layer.

116. The method of claim 115 further comprising fabricating said moisture protection layer from materials that possess moisture blocking properties and comprise a chemical compound selected:

a) from the group of metals, semi-metals, alloys, borides, carbides, diamond, diamond-like carbon, silicides, nitrides, phosphides, oxides, fluorides, chlorides, bromides, iodides;

b) from the group of any multinary compounds composed of borides, carbides, silicides, nitrides, phosphides, oxides, fluorides, chlorides, bromides, and iodides;

or

c) from the group of high-temperature stable organic polymers and high-temperature stable silicones.

117. The method of claim 115 further comprising fabricating said moisture protection layer from materials that comprise a single phase of crystalline, nano-crystalline, amorphous, or glassy material or any poly phase mixture or composite thereof.