METHOD FOR FORMING SILICON-CONTAINING MATERIALS DURING A PHOTOEXCITATION DEPOSITION PROCESS
First Claim
1. A method for forming a silicon material on a substrate, comprising:
- positioning a substrate within a process chamber;
exposing the substrate to a deposition gas comprising an aminosilane precursor, an oxygen precursor, and a nitrogen precursor;
exposing the deposition gas to an energy beam derived from a UV-source within the process chamber; and
depositing a silicon-containing material on the substrate, wherein the silicon-containing material is amorphous and comprises oxygen and nitrogen.
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Accused Products
Abstract
Embodiments of the invention generally provide a method for depositing films or layers using a UV source during a photoexcitation process. The films are deposited on a substrate and usually contain a material, such as silicon (e.g., epitaxy, crystalline, microcrystalline, polysilicon, or amorphous), silicon oxide, silicon nitride, silicon oxynitride, or other silicon-containing materials. The photoexcitation process may expose the substrate and/or gases to an energy beam or flux prior to, during, or subsequent a deposition process. Therefore, the photoexcitation process may be used to pre-treat or post-treat the substrate or material, to deposit the silicon-containing material, and to enhance chamber cleaning processes. Attributes of the method that are enhanced by the UV photoexcitation process include removing native oxides prior to deposition, removing volatiles from deposited films, increasing surface energy of the deposited films, increasing the excitation energy of precursors, reducing deposition time, and reducing deposition temperature.
621 Citations
34 Claims
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1. A method for forming a silicon material on a substrate, comprising:
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positioning a substrate within a process chamber;
exposing the substrate to a deposition gas comprising an aminosilane precursor, an oxygen precursor, and a nitrogen precursor;
exposing the deposition gas to an energy beam derived from a UV-source within the process chamber; and
depositing a silicon-containing material on the substrate, wherein the silicon-containing material is amorphous and comprises oxygen and nitrogen. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for forming a silicon material on a substrate, comprising:
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positioning a substrate containing a monocrystalline silicon-containing surface and a second surface within a process chamber;
exposing the substrate to an energy beam derived from a UV-source during a pretreatment process;
exposing the substrate to a deposition gas comprising an aminosilane and the energy beam during a deposition process; and
depositing a silicon-containing material epitaxially and selectively over the monocrystalline silicon-containing surface while maintaining the second surface free of the silicon-containing material. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A method for forming a silicon material on a substrate, comprising:
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positioning a substrate containing a native oxide layer within a process chamber;
exposing the substrate to an energy beam derived from a UV-source to remove the native oxide layer during a pretreatment process;
exposing the substrate to a deposition gas comprising an aminosilane and the energy beam during a deposition process;
depositing a polycrystalline silicon-containing material on the substrate; and
exposing the substrate to the energy beam during a post-treatment process after depositing the polycrystalline silicon-containing material. - View Dependent Claims (24, 25, 26, 27, 28)
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29. A method for forming a silicon material on a substrate, comprising:
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positioning a substrate containing a native oxide layer within a process chamber;
exposing the substrate to an energy beam derived from a UV-source to remove the native oxide layer during a pretreatment process;
exposing the substrate to a deposition gas comprising an aminosilane and the energy beam during a deposition process;
depositing an amorphous silicon-containing material on the substrate; and
exposing the substrate to the energy beam during a post-treatment process after depositing the amorphous silicon-containing material. - View Dependent Claims (30, 31, 32, 33, 34)
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Specification