A Stretchable Form of Single Crystal Silicon for High Performance Electronics on Rubber Substrates
First Claim
1. A stretchable semiconductor element comprising:
- a flexible substrate having a supporting surface; and
a semiconductor structure having a curved internal surface, wherein at least a portion of said curved internal surface is bonded to said supporting surface of said flexible substrate.
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Accused Products
Abstract
The present invention provides stretchable, and optionally printable, semiconductors and electronic circuits capable of providing good performance when stretched, compressed, flexed or otherwise deformed. Stretchable semiconductors and electronic circuits of the present invention preferred for some applications are flexible, in addition to being stretchable, and thus are capable of significant elongation, flexing, bending or other deformation along one or more axes. Further, stretchable semiconductors and electronic circuits of the present invention may be adapted to a wide range of device configurations to provide fully flexible electronic and optoelectronic devices.
266 Citations
57 Claims
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1. A stretchable semiconductor element comprising:
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a flexible substrate having a supporting surface; and
a semiconductor structure having a curved internal surface, wherein at least a portion of said curved internal surface is bonded to said supporting surface of said flexible substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A method for making a stretchable semiconductor element, said method comprising the steps of:
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providing a transferable semiconductor structure having an internal surface;
providing a prestrained elastic substrate in an expanded state, wherein said elastic substrate has an external surface; and
bonding at least a portion of said internal surface of said transferable semiconductor structure to said external surface of said prestrained elastic substrate in an expanded state; and
allowing said elastic substrate to at least partially relax to a relaxed state, wherein relaxation of the elastic substrate bends said semiconductor structure, thereby generating said stretchable semiconductor element. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32, 33)
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34. A stretchable electronic circuit comprising:
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a flexible substrate having a supporting surface; and
an electronic circuit having a curved internal surface, wherein at least a portion of said curved internal surface is bonded to said supporting surface of said flexible substrate. - View Dependent Claims (35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48)
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49. A method for making a stretchable electronic circuit, said method comprising the steps of:
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providing a transferable electronic circuit having an internal surface;
providing a prestrained elastic substrate in an expanded state, wherein said elastic substrate has an external surface; and
bonding at least a portion of said internal surface of said transferable electronic circuit to said external surface of said prestrained elastic substrate in an expanded state; and
allowing said elastic substrate to relax at least partially to a relaxed state, wherein relaxation of the elastic substrate bends said electronic circuit, thereby making said stretchable electronic circuit. - View Dependent Claims (50, 51, 52, 53, 54, 55, 56, 57)
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Specification