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Computer-implemented methods for performing one or more defect-related functions

  • US 20060287751A1
  • Filed: 06/06/2005
  • Published: 12/21/2006
  • Est. Priority Date: 06/06/2005
  • Status: Active Grant
First Claim
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1. A computer-implemented method for identifying noise in inspection data, comprising:

  • detecting events in sets of inspection data using detection parameters known to detect noise, nuisance events, and real events, wherein the sets of inspection data are generated by different inspections performed on a specimen; and

    identifying the events detected in a number of the sets of inspection data that is less than a predetermined number as noise.

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