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Process management apparatus, and process management method

  • US 20060287843A1
  • Filed: 05/26/2006
  • Published: 12/21/2006
  • Est. Priority Date: 05/30/2005
  • Status: Abandoned Application
First Claim
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1. A process management apparatus comprising:

  • an estimation knowledge recording section that records factor estimation knowledge information that associates one or more candidates of failure factors with each of plural failure results, which can occur in a processing system for processing an object, and includes information concerning conditions leading to the respective failure factors and analysis ID information corresponding to the respective conditions;

    an analysis method recording section that records analysis method information of inspection result data concerning an inspection result of a process in the processing system and analysis ID information corresponding to the respective pieces of analysis method information;

    a factor estimating section that estimates, on the basis of the factor estimation knowledge information corresponding to a specific failure result, a failure factor corresponding to the failure result; and

    an analysis processing section that analyzes inspection result data on the basis of the analysis method information wherein the factor estimating section presents the conditions required for estimation of a failure factor to a user as a question, and the analysis processing section receives analysis ID information of the condition corresponding to the question to thereby perform analysis on the basis of the analysis method information corresponding to the ID and present an analysis result to the user.

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